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Photonic Sensors

, Volume 7, Issue 2, pp 163–170 | Cite as

Effect of radio frequency magnetron sputtering power on structural and optical properties of Ti6Al4V thin films

  • Mohammed K. Khalaf
  • H. F. Al-Taay
  • Dawood S. Ali
Open Access
Regular

Abstract

In this research, the effects of target sputtering power on the structure and optical properties of radio frequency (RF) sputtered Ti6Al4V films were investigated. Different sputtering RF powers were used to produce different thicknesses of Ti6Al4V thin films. From the X-ray diffraction, it was found that the Ti6A14V films had polycrystalline cubic and hexagonal structures and increased films crystallinity and crystalline size with increasing the sputtering power. Atomic forces microscopy (AFM) gave us a nanometric film character, films homogeneity, and surfaces roughness. A higher degree of roughness and average grain size with increasing RF power was exhibited. Band gap and refractive index of Ti6Al4V thin films varied with sputtering RF powers.

Keywords

RF magnetron sputtering Ti6Al4V structural properties optical properties 

Notes

Acknowledgment

We acknowledge the support of the Dept. of Physics, College of Education for Pure Sciences, University of Anbar and Ministry of Science and Technology, Center of Applied Physics, Baghdad, Iraq. We acknowledge Aqeel F. Hasan, Jamal. F. Hamodi, and Mohammed Odaa for their precious help.

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Copyright information

© The Author(s) 2017

Open Access This article is distributed under the terms of the Creative Commons Attribution 4.0 International License (http://creativecommons.org/licenses/by/4.0/), which permits unrestricted use, distribution, and reproduction in any medium, provided you give appropriate credit to the original author(s) and the source, provide a link to the Creative Commons license, and indicate if changes were made.

Authors and Affiliations

  • Mohammed K. Khalaf
    • 1
  • H. F. Al-Taay
    • 2
  • Dawood S. Ali
    • 3
  1. 1.Ministry of Science and TechnologyCenter of Applied PhysicsBaghdadIraq
  2. 2.Department of Physics, College of Science for WomenUniversity of BaghdadBaghdadIraq
  3. 3.Department of Physics, College of Education for Pure SciencesUniversity of AnbarAnbarIraq

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