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On comparison of the temperature sensitivity of SU-8-based triple-arm MZI against straight rib optical waveguides patterned on silicon wafer

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Abstract

This study is performed to investigate the temperature sensitivity of SU-8-based triple-arm Mach–Zehnder interferometer (MZI) and straight waveguide. The proposed SU-8 2000-based rib waveguides are fabricated on a silicon wafer with 1.5-μm SiO2 thermal oxide layer. SU-8 layer of desired thickness is spin-coated onto the silicon wafer followed by patterning of the SU-8 waveguides. Temperature sensitivity of both waveguides is evaluated using the same heating source and under the same environmental conditions. Measurement results show that complex triple-arm MZI having different arm lengths offers a less linear sensitivity compared to the simple straight waveguide.

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Author information

Authors and Affiliations

  1. Computational Optics Research Group, Advanced Institute of Materials Science, Ton Duc Thang University, Ho Chi Minh City, Vietnam

    I. S. Amiri & P. Yupapin

  2. Faculty of Applied Sciences, Ton Duc Thang University, Ho Chi Minh City, Vietnam

    I. S. Amiri

  3. Photonics Research Centre, University of Malaya, 50603, Kuala Lumpur, Malaysia

    M. M. Ariannejad, M. Ghasemi & H. Ahmad

  4. Department of Electrical Engineering and Computer Science, Center for Quantum Devices, Northwestern University, Evanston, IL, 60208, USA

    A. Dehzangi

Authors
  1. I. S. Amiri
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  2. M. M. Ariannejad
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  3. M. Ghasemi
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  4. A. Dehzangi
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  5. H. Ahmad
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  6. P. Yupapin
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Corresponding author

Correspondence to I. S. Amiri.

Additional information

SU-8 (may stands for Substrate with 8 epoxy) photoresist series are negative tones, epoxy-type photoresists based on EPON™ SU-8 (also called EPIKOTE™ 157) epoxy resins from Hexion Specialty Chemicals, Inc. (Columbus, OH, 43215, USA), and originally developed and patented by IBM. It is commercially available from MicroChem Corp. (Newton, Massachusetts) [1].

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Amiri, I.S., Ariannejad, M.M., Ghasemi, M. et al. On comparison of the temperature sensitivity of SU-8-based triple-arm MZI against straight rib optical waveguides patterned on silicon wafer. Indian J Phys 93, 385–391 (2019). https://doi.org/10.1007/s12648-018-1307-0

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  • DOI: https://doi.org/10.1007/s12648-018-1307-0

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