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Structural, Morphological, and Optical Characterization of MoO3 Thin Films and MoO3/p-Si Based Diode

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Abstract

The molybdenum trioxide (MoO3) that was prepared by the solvothermal method was successfully deposited by using the conventional thermal evaporation technique. XRD and optical properties were studied as a function of annealing temperatures. The crystallization was enhanced and the defects were decreased with increasing the annealing temperature. The films showed an increase of optical energy gap and the refractive index with increasing of annealing temperature due to partial filling of oxygen vacancies and so an increase of the degree of crystallinity. Current versus voltage (I-V) characteristics of Au/MoO3/p-Si/Al junction were studied in darkness and at different temperatures. The junction ideality factor shows an enhancement with increasing measurement temperature in contrast with the barrier height. The device series resistance decreases with increasing measurement temperature. The space charge limited current dominated by the exponential trap of distribution is the governing conduction mechanism at a high forward potential region (V > 0.25).

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Acknowledgments

The work was not financially supported, and the National Research Centre of Egypt facilitates the work and the characterization tools.

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Authors and Affiliations

  1. Solid State Physics Department, Physical Research Division, National Research Centre, 33 El-Bohouth St., Dokki, Giza, 12622, Egypt

    A. M. Mansour, S. A. Gad, A. M. Moustafa & G. M. Mahmoud

  2. Egyptian National Committee of Crystallography, Academy of Scientific Research and Technology (ASRT), 101kasr Al-Aini St, Cairo, Egypt

    A. M. Moustafa

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Contributions

A. M. Mansour: Conceived and designed the experiments; Analyzed and interpreted the data; Contributed reagents, materials, analysis tools, or data; Wrote the paper. S. A. Gad, A.M. Mostafa, G. M. Mahmoud: Analyzed and interpreted the data; Contributed reagents, materials, analysis tools, or data, Wrote the paper. The author(s) read and approved the final manuscript.

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Mansour, A.M., Gad, S.A., Moustafa, A.M. et al. Structural, Morphological, and Optical Characterization of MoO3 Thin Films and MoO3/p-Si Based Diode. Silicon 14, 2189–2199 (2022). https://doi.org/10.1007/s12633-021-01014-6

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