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Performance evaluation of five-DOF motion in ultra-precision linear stage

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Abstract

In this study, the performance of five-DOF motion in ultra-precision linear stage is evaluated accurately by extending the application of the ISO 230-2 International Standard, which is focused only on the linear displacement motion of a linear stage. The bidirectional accuracy and bidirectional repeatability of positioning in five-DOF motion are calculated by measured geometric errors. Five geometric errors except for the linear displacement error of a linear stage are measured simultaneously using the optimal measurement system, which is designed to enhance the standard uncertainty of the estimated geometric errors. The geometric errors are in good agreement with those from the laser interferometer. In addition, the confidence intervals of the performances are determined by the uncertainties of the equipment used in the experiment.

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Authors and Affiliations

  1. School of Mechanical Engineering, Kyungpook National University, 80, Daehak-ro, Buk-gu, Daegu, Republic of Korea, 702-701

    Kwang-Il Lee, Jae-Chang Lee & Seung-Han Yang

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  1. Kwang-Il Lee
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  2. Jae-Chang Lee
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  3. Seung-Han Yang
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Correspondence to Seung-Han Yang.

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Lee, KI., Lee, JC. & Yang, SH. Performance evaluation of five-DOF motion in ultra-precision linear stage. Int. J. Precis. Eng. Manuf. 15, 129–134 (2014). https://doi.org/10.1007/s12541-013-0315-4

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  • DOI: https://doi.org/10.1007/s12541-013-0315-4

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