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Surface profile measurement of internal micro-structures

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Abstract

A measurement system is presented for surface profile measurements of micro-structures generated on internal cylindrical surfaces of workpieces. The main components of the measurement system are an air-bearing spindle to rotate the measured internal microstructures, an air-bearing displacement sensor with a diamond micro-stylus probe to scan the surface profile of the internal microstructures being measured and a vibration isolation table to reduce the disturbance of the measurement environment. The stability of the air-bearing displacement sensor with a diamond micro-stylus probe was experimentally investigated. Measurements of surface profile of internal micro-structures were also carried out while employing a newly-developed algorithm to correct errors caused by the tip radius of the diamond micro-stylus.

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Abbreviations

r stylus :

tip radius of the employed micro-stylus

r 0 :

radius of the selected reference circle of the measured internal micro-structures

r 1 :

radius of the reference circle extracted from the raw data of measurement

d :

distance between the origin of the air-bearing displacement sensor and the center of the spindle turntable

s i :

raw data of the measured profile

si′:

data of the measured profile in which the zero offset is compensated

References

  1. Thian, S. C. H., Feng, W., Wong, Y. S., Fuh, J. Y. H., Loh, H. T., Tee, K. H., Tang, Y., and Lu, L., “Dimensional measurement of 3D microstruture based on white light interferometer,” Journal of Physics: Conference Series, Vol. 48, No. 1, pp. 1435–1446, 2007.

    Article  Google Scholar 

  2. Michihata, M., Takaya, Y., and Hayashi, T., “Development of the nano-probe system based on the laser-trapping technique,” CIRP Annals-Manufacturing Technology, Vol. 57, No. 1, pp. 493–496, 2008.

    Article  Google Scholar 

  3. Takaya, Y., Michihata, M., Hayashi, T., and Washitani, T., “Dimensional measurement of microform with high aspect ratio using an optically controlled particle with standing wave scale sensing,” CIRP Annals-Manufacturing Technology, Vol. 61, No. 1, pp. 479–482, 2012.

    Article  Google Scholar 

  4. Bauza, M. B., Woody, S. C., Woody, B. A., and Smith, S. T., “Surface profilometry of high aspect ratio features,” Wear. Vol. 271, No. 3–4, pp. 519–522, 2011.

    Article  Google Scholar 

  5. Dai, G., Pohlenz, F., Xu, M., Koenders, L., Danzebrink, H. U., and Wilkening, G., “Accurate and traceable measurement of nano- and microstructures,” Measurement Science & Technology, Vol. 17, No. 3, pp. 545–552, 2006.

    Article  MATH  Google Scholar 

  6. Duong, T. H., Kim, H. C., Lee, D. Y., Lee, S. W., Park, E. S., and Je, T. J., “A theoretical deformation prediction of micro channels in ultra-precision machining,” Int. J. Precis. Eng. Manuf., Vol. 14, No. 2, pp. 173–181, 2013.

    Article  Google Scholar 

  7. Qiu, H., Nisitani, H., Kubo, A., and Yue, Y., “Autonomous form measurement on machining centers for free-form surfaces,” International Journal of Machine Tools and Manufacture, Vol. 44, No. 9, pp. 961–969, 2004.

    Article  Google Scholar 

  8. Xie, J., Lu, Y. X., Liu, X. R., and Lu, Y. J., “Study on 3D characterized profile and point accuracies of ground micro-pyramidstructured Si surface,” Int. J. Precis. Eng. Manuf., Vol. 14, No. 4, pp. 627–634, 2013.

    Article  MathSciNet  Google Scholar 

  9. Hansen, H. N., Carneiro, K., Haitjema, H., and De Chiffre, L., “Dimensional micro and nano metrology,” CIRP Annals-Manufacturing Technology, Vol. 55, No. 2, pp. 721–743, 2006.

    Article  Google Scholar 

  10. Yamamoto, M., Takeuchi, H., and Aoki, S., “Dimensional measurement of high aspect ratio micro structures with a resonating micro cantilever probe,” Microsystem Technology, Vol. 6, No. 5, pp. 179–183, 2000.

    Article  Google Scholar 

  11. Weckenmann, A., Peggs, G., and Hoffmann, J., “Probing systems for dimensional micro- and nano-metrology,” Measurement Science & Technology, Vol. 17, No. 3, 504–509, 2006.

    Article  Google Scholar 

  12. Petz, M., Tutsch, R., Christoph, R., Andraes, M., and Hopp, B., “Tactile-optical probes for three-dimensional microparts,” Measurement, Vol. 45, No. 10, pp. 2288–2298, 2012.

    Article  Google Scholar 

  13. Xu, B., Shimizu, Y., Takeishi, T., Ito, S., and Gao, W., “Surface form measurement and analysis of a cylindrical workpiece with microstructures,” Journal of Advanced Mechanical Design, Systems, and Manufacturing, Vol. 6, No. 6, pp. 936–948, 2012.

    Article  Google Scholar 

  14. Lebrasseur, E., Pourciel, J. B., Bourouina, T., Masuzawa, T., and Fujita, H., “A new characterization tool for vertical profile measurement of high-aspect-ratio microstructures,” Journal of Micromechanics Microengineering, Vol. 12, No. 3, pp. 280–285, 2002.

    Article  Google Scholar 

  15. Masuzawa, T., Hamasaki, Y., and Fujino, M., “Vibroscanning Method for Nondestructive Measurement of Small Holes,” CIRP Annal-Manufacturing Technology, Vol. 42, No. 1, pp. 589–592, 1993.

    Article  Google Scholar 

  16. Masuzawa, T., Kim, B. T., Bergaud, C., and Fujino, M., “Twin-Probe Vibroscanning Method for Dimensional Measurement of Microholes, CIRP Annals -Manufacturing Technology, Vol. 46, No. 1, pp. 437–440, 1997.

    Article  Google Scholar 

  17. Dai, G., Wolff, H., Pohlenz, F., Danzebrink, H. U., and Wilkening, G., “Atomic force probe for sidewall scanning of nano-and microstructures,” Applied Physics Letters, Vol. 88, No. 17, pp. 171908, 2006.

    Article  Google Scholar 

  18. Dai, G., Wolff, H., and Danzebrink, H. U., “Atomic force microscope cantilever based microcoordinate measuring probe for true three-dimensional measurements of microstructures,” Applied Physics Letters, Vol. 91, No. 12, pp. 121912, 2007.

    Article  Google Scholar 

  19. Peiner, E., Balke, M., and Doering, L., “Form measurement inside fuel injector nozzle spray holes,” Microelectronic Engineering, Vol. 86, No. 4–6, pp. 984–986, 2009.

    Article  Google Scholar 

  20. Muralikrishnan, B., Stone, J. A., and Stoup, J. R., “Fiber deflection probe for small hole metrology,” Precision Engineering, Vol. 30, No. 2, pp. 154–164, 2006.

    Article  Google Scholar 

  21. Stone, J. and Muralikrishnan, B., “Geometric Effects When Measuring Small Holes With Micro Contact Probes,” Journal of Research of the National Institute of Standards and Technology, Vol. 116, No. 2, pp. 573–587, 2011.

    Article  Google Scholar 

  22. Schwenke, H., Wäldele, F., Weiskirch, C., and Kunzmann, H., “Opto-tactile Sensor for 2D and 3D Measurement of Small Structures on Coordinate Measuring Machines,” CIRP Annals — Manufacturing Technology, Vol. 50, No. 1, pp. 361–364, 2001.

    Article  Google Scholar 

  23. Cui, J., Li, L., Li, J., and Tan, J. B., “Fiber probe for micro-hole measurement based on detection of returning light energy,” Sensors and Actuators A: Physical, Vol. 190, pp. 13–18, 2013.

    Article  Google Scholar 

  24. Cui, J., Li, L., and Tan, J., “Opto-tactile probe based on spherical coupling for inner dimension measurement,” Measurement Science and Technology, Vol. 23, No. 8, pp. 085105, 2012.

    Article  Google Scholar 

  25. Shimizu, Y., Xu, B., and Gao, W., “Fabrication of micro-ball styluses for scanning-type surface form metrology,” International Journal of Nanomanufacturing, Vol. 8, pp. 87–105, 2012.

    Article  Google Scholar 

  26. Xu, B., Shimizu, Y., Ito, S., and Gao, W., “A Micro-ball Tapping Probe for Form Measurement of Micro-structured Surface,” Journal of The Chinese Society of Mechanical Engineers, Vol. 34, pp. 73–80, 2013.

    Google Scholar 

  27. Wozniak, A., Mayer, J. R. R., and Balazinski, M., “Stylus tip envelop method: corrected measured point determination in high definition coordinate metrology,” International Journal of Advanced Manufacturing Technology, Vol. 42, No. 5–6, pp. 505–514, 2009.

    Article  Google Scholar 

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Authors and Affiliations

  1. Department of Nanomechanics, Tohoku University, 6-6-01, Aramaki Aza Aoba, Aoba-ku, Sendai, Japan, 980-8579

    Bin Xu, Yuki Shimizu, So Ito & Wei Gao

Authors
  1. Bin Xu
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  2. Yuki Shimizu
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  3. So Ito
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  4. Wei Gao
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Correspondence to Yuki Shimizu.

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Xu, B., Shimizu, Y., Ito, S. et al. Surface profile measurement of internal micro-structures. Int. J. Precis. Eng. Manuf. 14, 1535–1541 (2013). https://doi.org/10.1007/s12541-013-0207-7

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  • DOI: https://doi.org/10.1007/s12541-013-0207-7

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