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Batch synthesis of transfer-free graphene with wafer-scale uniformity

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Abstract

Scalable synthesis of transfer-free graphene over insulators offers exciting opportunity for next-generation electronics and optoelectronics. However, rational design of synthetic protocols to harvest wafer-scale production of directly grown graphene still remains a daunting challenge. Herein we explore a batch synthesis of large-area graphene with wafer-scale uniformity by virtue of direct chemical vapor deposition (CVD) on quartz. Such a controllable CVD approach allows to synthesize 30 pieces of 4-inch graphene wafers in one batch, affording a low fluctuation of optical and electrical properties. Computational fluid dynamics simulations reveal the mechanism of uniform growth, indicating thermal field and confined flow field play leading roles in attaining the batch uniformity. The resulting wafer-scale graphene enables the direct utilization as key components in optical elements. Our method is applicable to other types of insulating substrates (e.g., sapphire, SiO2/Si, Si3N4), which may open a new avenue for direct manufacture of graphene wafers in an economic fashion.

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Acknowledgements

This work was financially supported by the National Basic Research Program of China (No. 2016YFA0200103), the National Natural Science Foundation of China (Nos. 61527814, 51702225, 51432002, 61474109, 51290272, 51502007, 11474274, and 51672007), the National Equipment Program of China (No. ZDYZ2015-1), Beijing Municipal Science and Technology Planning Project (Nos. Z181100004818002 and Z191100000819004), and Beijing Natural Science Foundation (No. 4182063).

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  1. Bei Jiang and Qiyue Zhao contributed equally to this work.

Authors and Affiliations

  1. Center for Nanochemistry (CNC), Beijing Science and Engineering Center for Nanocarbons, College of Chemistry and Molecular Engineering, Peking University, Beijing, 100871, China

    Bei Jiang, Zhepeng Zhang, Bingzhi Liu, Jingyuan Shan, Yanfeng Zhang & Zhongfan Liu

  2. State Key Laboratory for Artificial Microstructures and Mesoscopic Physics, School of Physics, Peking University, Beijing, 100871, China

    Qiyue Zhao & Tongjun Yu

  3. College of Energy, Soochow Institute for Energy and Materials Innovations (SIEMIS), Key Laboratory of Advanced Carbon Materials and Wearable Energy Technologies of Jiangsu Province, Soochow University, Suzhou, 215006, China

    Liang Zhao, Mark H. Rümmeli & Jingyu Sun

  4. Beijing Graphene Institute (BGI), Beijing, 100095, China

    Xuan Gao, Jingyu Sun & Zhongfan Liu

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  1. Bei Jiang
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Correspondence to Jingyu Sun or Zhongfan Liu.

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Jiang, B., Zhao, Q., Zhang, Z. et al. Batch synthesis of transfer-free graphene with wafer-scale uniformity. Nano Res. 13, 1564–1570 (2020). https://doi.org/10.1007/s12274-020-2771-3

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  • DOI: https://doi.org/10.1007/s12274-020-2771-3

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