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A micro resonant pressure sensor with adjustable quality factor

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Abstract

Being an important component of micro-electro-mechanical system (MEMS), the micro resonant sensor offers advantages such as the compact size, high accuracy, ease of integration with the test circuit, fast response time, and resistance to frequency signal distortion. Moreover, the tool has broad market prospects. In order to improve the performance of sensors and reduce production costs, in this paper, a micro-resonant pressure sensor, with an adjustable quality factor, is proposed to achieve the measurement of pressure by the electrostatic excitation-capacitive detection. Furthermore, the vibration theory of the sensor in the presence of multi-field coupling, including electrostatic force, molecular force, and air damping force is deduced, and the principle of the adjustable quality factor is analyzed. Then, a sample of the sensor with an adjustable quality factor is developed by using the micromachining method, and a high-precision detection circuit, based on a 90° feedback loop, is constructed to manufacture the sensor quality factor adjustment experiment. The results show that the quality factor is 16.89 when the gain M is zero. When the gain is equal to 1.07·106, the quality factor of the sensor increases by a factor of 4.73 to reach 79.94. It can significantly improve the detection sensitivity and accuracy of such sensors. Finally, this approach can meet different testing requirements and significantly reduce the cost of equipment fabrication and reduce the experimental expenses.

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Acknowledgements

This project is supported by Natural Science Foundation of Hebei Province, China (E2021402024); Scientific research project of colleges and universities in Hebei Province, China (QN2022156).

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Authors and Affiliations

  1. College of Mechanical and Equipment Engineering, Hebei University of Engineering, Handan, 056001, China

    Jianhua Ren, Dezhi Hou & Xiaorui Fu

  2. Key Laboratory of Intelligent Industrial Equipment Technology of Hebei Province, Hebei University of Engineering, Handan, 056001, China

    Jianhua Ren, Dezhi Hou & Xiaorui Fu

  3. Department of Information Engineering, Xuanhua Vocational College of Science and Technology, Zhangjiakou, 075100, China

    Xufei Shi

Authors
  1. Jianhua Ren
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  2. Dezhi Hou
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  3. Xufei Shi
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  4. Xiaorui Fu
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Correspondence to Xiaorui Fu.

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The authors declare that there are no conflicts of interest regarding the publication of this paper.

Additional information

Xiaorui Fu is a lecturer in College of Mechanical and Equipment Engineering, Hebei University of Engineering, China. He received his Ph.D. in Mechanical Engineering from Yanshan University, China. His primary research interests in the area of electromechanical coupling dynamics and performance optimization of micro sensors.

Jianhua Ren received the B.S. degree from the Hebei University of Technology, the M.S. degrees from Taiyuan University of Technology in 1996 and 2002, respectively, and the Ph.D. degree of China University of Mining and Technology (Beijing) China, in 2011. In addition, she was awarded the title of Professor of Hebei University of Engineering in 2013 and served as the tutor of master students. Her current research interests include intelligent manufacturing, deep learning, artificial intelligence.

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Ren, J., Hou, D., Shi, X. et al. A micro resonant pressure sensor with adjustable quality factor. J Mech Sci Technol 38, 347–356 (2024). https://doi.org/10.1007/s12206-023-1228-5

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  • DOI: https://doi.org/10.1007/s12206-023-1228-5

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