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Influence of windows on the phase error of interferometric surface topography of a wafer using wavelength scanning

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Abstract

Phase-calculation formula, involving a window and Fourier transform term, have been used for decades to profile the shape of sample surfaces. Windows can be designed using the phase-calculation polynomial theory to eliminate various types of phase errors. Here, we discuss the phase errors calculated by the phase-calculation formulas, comprising the windows and Fourier transform terms, by considering not only the linear error of the phase modulation but also the combined error between the higher harmonics and linear error of the phase modulation. The surface topography of a 4-inch wafer was also profiled using phase-calculation formulas for the various types of windows and a Fizeau-type interferometer. We also discuss the repeatability of the phase errors calculated using phase-calculation formulas.

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Acknowledgments

This research was supported by Korea Basic Science Institute (National research Facilities and Equipment Center) grant funded by the Ministry of Education. (grant No. 2021R1A6C 101A449).

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Authors and Affiliations

  1. School of Mechanical Engineering, Pusan National University, Busan, 46241, Korea

    Jurim Jeon & Yangjin Kim

  2. Department of Mechanical Engineering, The University of Tokyo, Tokyo, 113-8656, Japan

    Naohiko Sugita

Authors
  1. Jurim Jeon
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  2. Yangjin Kim
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  3. Naohiko Sugita
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Corresponding author

Correspondence to Yangjin Kim.

Additional information

Jurim Jeon received her B. S. degree at the School of Mechanical Engineering, Pusan National University in 2021. She is now a Ph.D. course student at the School of Mechanical Engineering, Pusan National University. Her research interests include precision measurement using wavelength-scanning Fizeau interferometer and fringe analysis using deep learning. She is a member of the Korean Society for Precision Engineering, Korean Society of Mechanical Engineers, and International Society for Optics and Photonics.

Yangjin Kim received his B.S. and Ph.D. degrees from the Department of Mechanical Engineering, The University of Tokyo, in 2007 and 2015, respectively. He was the professional research personnel at the Korea Institute of Machinery and Materials (KIMM) for military service from 2009 to 2012. He is currently an Associate Professor at the School of Mechanical Engineering, Pusan National University. His research interests include precision measurement using a wavelength-scanning Fizeau interferometer, fringe analysis using phase modulation, and the intelligent machine tool systems. He is a member of the Korean Society for Precision Engineering, Korean Society of Mechanical Engineers, Japan Society for Precision Engineering, American Society of Mechanical Engineers, and International Society for Optics and Photonics.

Naohiko Sugita received his M.S. and Ph.D. degrees from the Department of Mechanical Engineering, The University of Tokyo, in 1996 and 2005, respectively. He worked with NEC in Tokyo, Japan, between 1996 and 2003. He was also a research associate and an Associate Professor at The University of Tokyo in 2003 and 2007, respectively. He is now a Professor at the Department of Mechanical Engineering, The University of Tokyo, in 2014. His research interests include biomaterial machining, robot-assisted surgical systems, and intelligent manufacturing systems.

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Jeon, J., Kim, Y. & Sugita, N. Influence of windows on the phase error of interferometric surface topography of a wafer using wavelength scanning. J Mech Sci Technol 37, 4809–4816 (2023). https://doi.org/10.1007/s12206-023-0833-7

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  • DOI: https://doi.org/10.1007/s12206-023-0833-7

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