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Fatigue testing of integrated thin film metal membranes for implantable biomedical pressure sensors

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Abstract

The longevity of thin film membranes is vital for the lifetime monitoring of fluid pressure inside the human body. However, aging and mechanical fatigue of the thin film material hinders the long-term reliability of implantable pressure sensors. Despite this, designers tend to neglect the fatigue life analysis of thin films in the design and fabrication of MEMS pressure sensors. Here, we present a low-cost fatigue testing system, which is custom designed from a modern multimedia speaker and subwoofer system. The subwoofer acts as an acoustic booster to amplify the sound vibrations into large stress amplitudes required for displacing the thin film membranes. A Keyence laser displacement sensor records the displacements of the thin films triggered in response to the sound-based stress amplitudes. A scanning electron microscope (SEM) is used in observing the surfaces of the thin films. An FEA parametric study and the fatigue testing results show significant correlations, except for the displacements values as the input Gaussian random vibrations are exaggerated in the experiments to visualize the bursting nature of the thin film membranes.

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References

  1. T. Tagawa, T. Tamura and P. A. Oberg, Biomedical Sensors and Instruments, CRC Press (2011).

    Book  Google Scholar 

  2. Y. H. Lee, Y. Jung, J.-H. Kwak and S. Hur, Development of capacitive-type MEMS microphone with CMOS amplifying chip, International Journal of Precision Engineering and Manufacturing, 15 (2014) 1423–1427.

    Article  Google Scholar 

  3. L. Yu, B. J. Kim and E. Meng, Chronically implanted pressure sensors: Challenges and state of the field, Sensors, 14 (2014) 20620–20644.

    Article  Google Scholar 

  4. D. Leung, S. Malpas, D. McCormick and D. Budgett, In-situ re-calibration of implanted pressure sensors, 2017 IEEE Sensors (2017) 1–3.

    Google Scholar 

  5. M. N. Dakurah, C. Koo, W. Choi and Y.-H. Joung, Implantable bladder sensors: A methodological review, International Neurourology Journal, 19 (2015) 133.

    Article  Google Scholar 

  6. M.-S. Shin, J.-H. Park and J. Y. Kim, Study on effect of mean stress on fatigue life prediction of thin film structure, Journal of Mechanical Science and Technology, 30 (2016) 1547–1554.

    Article  Google Scholar 

  7. M. F. Pantano, H. D. Espinosa and L. Pagnotta, Mechanical characterization of materials at small length scales, Journal of Mechanical Science and Technology, 26 (2012) 545–561.

    Article  Google Scholar 

  8. M. Liakat and M. Khonsari, An experimental approach to estimate damage and remaining life of metals under uniaxial fatigue loading, Materials & Design, 57 (2014) 289–297.

    Article  Google Scholar 

  9. ASTM E466-96, Standard Practice for Conducting Force Controlled Constant Amplitude Axial Fatigue Tests of Metallic Materials, ASTM International, West Conshohocken, PA, http://www.astm.org (1996).

    Google Scholar 

  10. K. Sobczyk and B. Spencer Jr., Random Fatigue: From Data to Theory, Academic Press (2012).

    MATH  Google Scholar 

  11. Y. Jiang, G. J. Yun, L. Zhao and J. Tao, Experimental design and validation of an accelerated random vibration fatigue testing methodology, Shock and Vibration, (2015).

    Google Scholar 

  12. P. S. Cottler, W. R. Karpen, D. A. Morrow and K. R. Kaufman, Performance characteristics of a new generation pressure microsensor for physiologic applications, Annals of Biomedical Engineering, 37 (2009) 1638–1645.

    Article  Google Scholar 

  13. D. Wagner, F. Cavalieri, C. Bathias and N. Ranc, Ultrasonic fatigue tests at high temperature on an austenitic steel, Propulsion and Power Research, 1 (2012) 29–35.

    Article  Google Scholar 

  14. M. Freitas, V. Anes, D. Montalvao, L. Reis and A. Ribeiro, Design and assembly of an ultrasonic fatigue testing machine, Anales de Mecânica de la Fractura (2011).

    Google Scholar 

  15. J. Soovere, Sonic fatigue testing of an advanced composite aileron, Journal of Aircraft, 19 (1982) 304–310.

    Article  Google Scholar 

  16. B. L. Clarkson, Review of Sonic Fatigue Technology, NASA (1994).

    Google Scholar 

  17. J. Quast, C. Boehlert, R. Gardner, E. Tuegel and T. Wyen, A microstructure and sonic fatigue investigation of Ti-TiB functionally graded materials, Materials Science and Engineering: A, 497 (2008) 1–9.

    Article  Google Scholar 

  18. H. C. Choi and J. H. Park, Prediction of residual stress distribution in multi-stacked thin film by curvature measurement and iterative FEA, Journal of Mechanical Science and Technology, 19 (2005) 1065–1071.

    Article  Google Scholar 

  19. Y. Woo and S.-H. Kim, Sensitivity analysis of plating conditions on mechanical properties of thin film for MEMS applications, Journal of Mechanical Science and Technology, 25 (2011) 1017.

    Article  Google Scholar 

  20. J. A. Helsen and H. J. Breme, Metals as Biomaterials, J. A. Helsen and H. Jürgen Breme (Editor), ISBN 0-471-96935-4. Wiley-VCH, October (1998) 522.

  21. M. Niinomi, Metallic biomaterials, Journal of Artificial Organs, 11 (2008) 105–110.

    Article  MATH  Google Scholar 

  22. D. M. Brunette, P. Tengvall, M. Textor and P. Thomsen, Titanium in Medicine: Material Science, Surface Science, Engineering, Biological Responses and Medical Applications, Springer Science & Business Media (2012).

    Google Scholar 

  23. D. Banerjee and J. Williams, Perspectives on titanium science and technology, Acta Materialia, 61 (2013) 844–879.

    Article  Google Scholar 

  24. L. M. Gammon, R. D. Briggs, J. M. Packard, K. W. Batson, R. Boyer and C. W. Domby, Metallography and microstructures of titanium and its alloys, Materials Park, OH: ASM International, 2004 (2004) 899–917.

    Google Scholar 

  25. F.-Q. Li, J. Zhao, J.-H. Mo, J.-J. Li and L. Huang, Comparative study of the microstructure of Ti-6Al-4V titanium alloy sheets under quasi-static and high-velocity bulging, Journal of Mechanical Science and Technology, 31 (2017) 1349–1356.

    Article  Google Scholar 

  26. N. K. Sodavaram, K. M. Arif, D. M. Budgett and D. McCormick, Size optimization and fatigue study of Ti-6Al-4V membranes for long-term ICP measurement, 2016 12th IEEE/ASME International Conference on Mechatronic and Embedded Systems and Applications (MESA) (2016) 1–6

  27. W. K. Schomburg, Introduction to Microsystem Design, Springer (2015).

    Book  Google Scholar 

  28. N. Shamsaei, M. Gladskyi, K. Panasovskyi, S. Shukaev and A. Fatemi, Multiaxial fatigue of titanium including step loading load path alteration sequence effects, International Journal of Fatigue, 32 (2010) 1862–1874.

    Article  Google Scholar 

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Acknowledgments

This work was supported by Massey University (RM19371) and Callaghan Innovation, a government agency supporting hi-tech business in New Zealand.

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Authors and Affiliations

  1. School of Engineering and Advanced Technology, Massey University, Auckland, 0632, New Zealand

    Nireekshan Kumar Sodavaram & Khalid Mahmood Arif

Authors
  1. Nireekshan Kumar Sodavaram
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  2. Khalid Mahmood Arif
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Corresponding author

Correspondence to Khalid Mahmood Arif.

Additional information

Recommended by Associate Editor Dong-Weon Lee

Nireekshan Kumar Sodavaram is currently a Ph.D. student at the School of Engineering and Advanced Technology, Massey University Auckland, New Zealand. His research interests include MEMS fabrication and testing, biomedical sensors, and CMOS design.

Khalid Mahmood Arif is a Senior Lecture in the School of Engineering and Advanced Technology, Massey University Auckland, New Zealand. He holds a Ph.D. in mechanical engineering from Purdue University West Lafayette, Indiana and an M.Eng. in engineering synthesis from the University of Tokyo, Japan. His main research interests include sensors/biosensors, smart systems, and 3D printing.

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Sodavaram, N.K., Arif, K.M. Fatigue testing of integrated thin film metal membranes for implantable biomedical pressure sensors. J Mech Sci Technol 33, 3383–3389 (2019). https://doi.org/10.1007/s12206-019-0633-2

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  • DOI: https://doi.org/10.1007/s12206-019-0633-2

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