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Performance Characteristics of a New Generation Pressure Microsensor for Physiologic Applications

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Abstract

A next generation fiber-optic microsensor based on the extrinsic Fabry–Perot interferometric (EFPI) technique has been developed for pressure measurements. The basic physics governing the operation of these sensors makes them relatively tolerant or immune to the effects of high-temperature, high-EMI, and highly-corrosive environments. This pressure microsensor represents a significant improvement in size and performance over previous generation sensors. To achieve the desired overall size and sensitivity, numerical modeling of diaphragm deflection was incorporated in the design, with the desired dimensions and calculated material properties. With an outer diameter of approximately 250 μm, a dynamic operating range of over 250 mmHg, and a sampling frequency of 960 Hz, this sensor is ideal for the minimally invasive measurement of physiologic pressures and incorporation in catheter-based instrumentation. Nine individual sensors were calibrated and characterized by comparing the output to a U.S. National Institute of Standards and Technology (NIST) Traceable reference pressure over the range of 0–250 mmHg. The microsensor performance demonstrated accuracy of better than 2% full-scale output, and repeatability, and hysteresis of better than 1% full-scale output. Additionally, fatigue effects on five additional sensors were 0.25% full-scale output after over 10,000 pressure cycles.

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Acknowledgments

The authors would like to acknowledge Dan Blevins for technical assistance in sensor fabrication and David Dausch from RTI International for assistance with the diaphragm design and photoetching processes. This work was supported by the National Center for Medical Rehabilitation Research (NCMRR) within the National Institute of Child Health and Human Development (NICHD) RO1 HD31476, “Microsensor for Intramuscular Pressure Measurement,” as well as the National Eye Institute (NEI) 5R44EY013902-03 “Miniature Non-Invasive IOP Measurement Device.” Its contents are solely the responsibility of the authors and do not necessarily represent the official views of the NCMRR, NEI, or NIH.

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Authors and Affiliations

  1. Luna Innovations, Inc., 706 Forest Street, Suite A, Charlottesville, VA, 22903, USA

    Patrick S. Cottler

  2. Biomechanics Laboratory, Mayo Clinic, Rochester, MN, 55906, USA

    Whitney R. Karpen, Duane A. Morrow & Kenton R. Kaufman

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  1. Patrick S. Cottler
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  2. Whitney R. Karpen
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  3. Duane A. Morrow
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  4. Kenton R. Kaufman
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Correspondence to Patrick S. Cottler.

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Cottler, P.S., Karpen, W.R., Morrow, D.A. et al. Performance Characteristics of a New Generation Pressure Microsensor for Physiologic Applications. Ann Biomed Eng 37, 1638–1645 (2009). https://doi.org/10.1007/s10439-009-9718-x

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  • DOI: https://doi.org/10.1007/s10439-009-9718-x

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