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Mass measurement method based on resonance frequency of the capacitive thin membrane sensor

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Abstract

This paper introduces a mass measurement method and a system for capacitive membrane sensor, which uses the principle of membrane displacement at a resonance frequency which maximizes output voltage due to its strong vibration. The implemented system consists of dedicated hardware, firmware, and PC. The resonance frequencies of the Si3N4 membrane film are 59.2 kHz and 58.2 kHz measured using laser vibrometer and the proposed method, respectively. The resonance frequency of which quartz has a resonance frequency of 32.768 kHz is 32.775 kHz by our method. The suggested method has 600 times more sensitive in measuring the resonance frequency of a capacitive membrane than the conventional static capacitance measurement method.

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Authors and Affiliations

  1. Electronic Engineering Department, Pusan National University, Busan, 46241, Korea

    Youngju Park, Sangman Kim & Jusung Park

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  1. Youngju Park
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  2. Sangman Kim
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  3. Jusung Park
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Correspondence to Jusung Park.

Additional information

Recommended by Associate Editor Seong-Chan Jun

Youngju Park was born in Busan, Republic of Korea. He received his B.S. degree and M.S. degree in electronic engineering from Pusan National University, Busan, Republic of Korea in 2008, 2010, respectively. Now he is a Ph.D. candidate at VLSI Design Laboratory, Department of Electronic Engineering, Pusan National University. His research area involves design of digital ICs and embedded SoC platform.

Jusung Park received his B.S. degree in electronic engineering from Pusan National University, Busan, Korea, in 1976, and M.S. degree in electrical engineering from KAIST, Seoul, Korea, in 1978, and a Ph.D. degree in electrical engineering from University of Florida, Gainesville, US, in 1989. From 1978 to 1991 he was with ETRI, Daejun, Korea, as a Principal Research Engineer, Manager, and Director of the IC design group. In 1991 he joined the Electronics Department of Pusan National University, Busan, Korea, where he is now a Professor of electrical engineering.

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Park, Y., Kim, S. & Park, J. Mass measurement method based on resonance frequency of the capacitive thin membrane sensor. J Mech Sci Technol 32, 3263–3271 (2018). https://doi.org/10.1007/s12206-018-0628-4

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  • DOI: https://doi.org/10.1007/s12206-018-0628-4

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