Skip to main content
SpringerLink
Log in

Analysis of Li-related defects in ZnO thin films influenced by annealing ambient

  • Published:
Bulletin of Materials Science Aims and scope Submit manuscript

Abstract

Li-doped ZnO thin films were grown on quartz substrates by radio frequency magnetron sputtering and in situ annealing under O2 or Ar ambient. Li-related defects in ZnO films strongly depend on the annealing ambient. AFM and XRD indicated that ZnO films possessed a good crystallinity with c-axis orientation, uniform thickness and dense surface. Electrical and optical properties demonstrated that, an amount of LiZn defect had existed in ZnO annealed under O2ambient and an amount of Lii(o) defect had existed in ZnO annealed under Ar ambient. First-principle calculations were performed to calculate formation energies of Li-doped ZnO in order to explain the formation mechanism of Li-related defects in ZnO.

This is a preview of subscription content, log in via an institution to check access.

Access this article

Log in via an institution

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Institutional subscriptions

Figure 1
Figure 2
Figure 3
Figure 4
Figure 5
Figure 6

Similar content being viewed by others

References

  • Coppa B J, Davis R F and Nemanich R J 2003 Appl. Phys. Lett. 82 400

    Article  Google Scholar 

  • Hu J, He H Y and Pan B C 2008 J. Appl. Phys 103 113706

  • Iwata K, Fons P, Yamada A, Matsubara K and Niki S 2000 J. Cryst. Growth 209 526

    Article  Google Scholar 

  • Joseph M, Tabata H, Saeki H, Ueda K and Kawai T 2001 Physica B 302/303 140

    Article  Google Scholar 

  • Lee W J, Kang J and Chang K J 2006 Phys. Rev. B 73 024117

    Article  Google Scholar 

  • Look D C and Claflin B 2004 Phys. Status Solidi B 241 624

    Article  Google Scholar 

  • Look D C, Claflin B, Alivov Y I and Park S 2004 Phys. Status Solidi A 201 2203

    Article  Google Scholar 

  • Look D C, Reynolds D C, Litton C W, Jones R L, Eason D B and Cantwell G 2002 Appl. Phys. Lett. 81 1830

    Article  Google Scholar 

  • Mohamed G A, Abd El-Moiz A B and Rashad M 2005 Physica B 370 158

    Article  Google Scholar 

  • Nakagawa T, Sakaguchi I, Matsunaga K, Yamamoto T, Haneda H and Ikuhara Y 2005 Meth. Phys. Res. B 232 343

    Google Scholar 

  • Osamu N, Toru S, Takahiro M, Seiichi A, Hitoshi T and Tomoji K 2000 Appl. Phys. Lett. 77 3257

  • Park C H, Zhang S B and Wei S H 2002 Phys. Rev. B 66 073202

    Article  Google Scholar 

  • Qin R et al 2009 Phys. Chem. C 113 9541

  • Shan F K, Liu G X, Lee W J and Shin B C 2007 J. Appl. Phys. 101 053106

    Article  Google Scholar 

  • Van de Walle C G 2000 Phys. Rev. Lett. 85 1012

    Article  Google Scholar 

  • Zhang S B, Wei S H and Zunger A F 2001 Phys. Rev. B 63 075205

    Article  Google Scholar 

Download references

Acknowledgments

This work was supported by the Research Foundation of Education Bureau of Liaoning Province, China (No. L2011098), the Foundation for Key Program of Ministry of Education, China (No. 212031) and the National Nature Science Foundation of China (No. 51074087).

Author information

Authors and Affiliations

  1. Department of Materials Science and Engineering, Liaoning University of Technology, Jinzhou, 121001, China

    BING WANG & LIDAN TANG

Authors
  1. BING WANG
    View author publications

    You can also search for this author in PubMed Google Scholar

  2. LIDAN TANG
    View author publications

    You can also search for this author in PubMed Google Scholar

Corresponding author

Correspondence to BING WANG.

Rights and permissions

Reprints and permissions

About this article

Check for updates. Verify currency and authenticity via CrossMark

Cite this article

WANG, B., TANG, L. Analysis of Li-related defects in ZnO thin films influenced by annealing ambient. Bull Mater Sci 37, 35–39 (2014). https://doi.org/10.1007/s12034-014-0619-8

Download citation

  • Received:

  • Revised:

  • Published:

  • Issue Date:

  • DOI: https://doi.org/10.1007/s12034-014-0619-8

Keywords

Search

Navigation