Abstract
Nano-structured superhard coatings represent the state-of-the-art in the rapidly increasing worldwide market for protective coatings. In this study, the combination of nano-composite and nano-multilayered structures into the same coating was attempted. Nano-multilayered coatings of TiN/TiSiN and CrN/CrSiN were deposited on tool steel substrates by closed-magnetic-field unbalanced DC magnetron sputter ion plating. The coating structures were characterized using X-ray diffraction, atomic force microscopy, and scanning electron microscopy. Mechanical characterizations were performed including nano-hardness measurement, progressively-increasing-load scratch test, and wear test. TiN/TiSiN coatings have a nano-hardness of 40.2 GPa, whereas CrN/CrSiN coatings have a hardness of 30.9 GPa. TiN/TiSiN coatings also showed a higher critical failure force and scratch fracture toughness as well as better wear resistance and lower acoustic emission signal, indicating less total damage to the coatings.
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References
Koehler, JS, “Attempt to Design a Strong Solid.” Phys. Rev. B, 2 547–551 (1970)
Li, SZ, Shi, YL, Peng, HR, “Ti-Si-N Films Prepared by Plasma-Enhanced Chemical Vapor Deposition.” Plasma Chem. Plasma Process., 12 287–297 (1992)
Veprek, S, Reiprich, S, “A Concept for the Design of Novel Superhard Coatings.” Thin Solid Films, 268 64–71 (1995)
Veprek, S, Reiprich, S, Li, SZ, “Superhard Nanocrystalline Composite Materials: The TiN/Si3N4 System.” Appl. Phys. Lett., 66 2640–2642 (1995)
Veprek, S, Maennling, H-D, Niederhofer, A, Ma, D, Mukherjee, S, “Degradation of Superhard Nanocomposites by Built-in Impurities.” J. Vac. Sci. Technol. B, 22 L5–L9 (2004)
Shinn, M, Hultman, L, Barnett, SA, “Growth, Structure, and Microhardness of Epitaxial TiN/NbN Superlattices.” J. Mater. Res., 7 901–911 (1992)
Helmersson, U, Todorova, S, Barnett, SA, Sundgren, J-E, Markert, LC, Greene, JE, “Growth of Single-Crystal TiN/VN Strained-Layer Superlattices with Extremely High Mechanical Hardness.” J. Appl. Phys., 62 481–484 (1987)
Muenz, W-D, Lewis, DB, Horsepian, PE, Schoenjahn, C, Ehiasarian, A, Smith, IJ, “Industrial Scale Manufactured Superlattice Hard PVD Coatings.” Surf. Eng., 17 15–27 (2001)
Li, D, Lin, XW, Chen, SC, Dravid, VP, Chung, YW, Wong, MS, Sproul, WD, “Structure and Hardness Studies of CN x /TiN Nanocomposite Coatings.” Appl. Phys. Lett., 68 1211–1213 (1996)
Wu, ML, Qian, WD, Chung, YW, Wang, YY, Wong, MS, Sproul, WD, “Superhard Coatings of CNx/ZrN Multilayers Prepared by DC Magnetron Sputtering.” Thin Solid Films, 308/309 113–117 (1997)
Jilek, M, Cselle, T, Holubar, P, Morstein, M, Veprek-Heijman, MGJ, Veprek, S, “Development of Novel Coating Technology by Vacuum Arc with Rotating Cathodes for Industrial Production of nc-(Al1−x Ti x )N/a-Si3N4 Superhard Nanocomposite Coatings for Dry, Hard Machining.” Plasma Chem. Plasma Process., 24 493–510 (2004)
Carvalho, S, Ribeiro, E, Rebouta, L, Pacaud, J, Goudeau, P, Renault, PO, Riviere, JP, Tavares, CJ, “PVD Grown (Ti, Si, Al)N Nanocomposite Coatings and (Ti, Al)N/(Ti, Si)N Multilayers: Structural and Mechanical Properties.” Surf. Coat. Technol., 172 109–116 (2003)
Karvankova, P, Veprek-Heijman, MGJ, Zawrah, MF, Veprek, S, “Thermal Stability of nc-TiN/a-BN/a-TiB2 Nanocomposite Coatings Deposited by Plasma Chemical Vapor Deposition.” Thin Solid Films, 467 133–139 (2004)
Yang, S, Wiemann, E, Teer, DG, “The Properties and Performance of Cr-Based Multilayer Nitride Hard Coatings Using Unbalanced Magnetron Sputtering and Elemental Metal Targets.” Surf. Coat. Technol., 188–189 662–668 (2004)
Bao, MD, Xu, XB, Sun, HL, Teer, DG, “Microstructure and Properties of Silicon Doped CrN/CrSiN Gradient Multilayer Coatings.” TACT 2009 International Thin Films Conference, Taibei, 2009.
Tian, J, Han, Z, Lai, Q, Yu, X, Li, G, Cu, M, “Two-Step Penetration: A Reliable Method for the Measurement of Mechanical Properties of Hard Coatings.” Surf. Coat. Technol., 176 267–271 (2004)
D’Heurle, FM, “Aluminum Films Deposited by RF Sputtering.” Metall. Trans., 1 725–732 (1970)
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The authors acknowledge the support of European Union Project RESTOOL.
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Cao, JL., Choy, KL., Sun, HL. et al. Syntheses of nano-multilayered TiN/TiSiN and CrN/CrSiN hard coatings. J Coat Technol Res 8, 283–288 (2011). https://doi.org/10.1007/s11998-010-9275-0
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DOI: https://doi.org/10.1007/s11998-010-9275-0