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Mapping mechanical properties on the nanoscale using atomic-force acoustic microscopy

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  • Scanning Probe Microscopy for Materials Science
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Abstract

Tools are being developed that use the atomic-force microscope (AFM) to measure mechanical properties with nanoscale spatial resolution. Contact-resonance-spectroscopy techniques such as atomic-force acoustic microscopy involve the vibrational modes of the AFM cantilever when its tip is in contact with a material. These methods enable quantitative maps of local mechanical properties such as elastic modulus and thin-film adhesion. The information obtained furthers the understanding of patterned surfaces, thin films, and nanoscale structures.

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Authors and Affiliations

  1. National Institute of Standards and Technology, 325 Broadway, Boulder, Colorado, 80305-3328, USA

    D. C. Hurley, M. Kopycinska-Müller & A. B. Kos

Authors
  1. D. C. Hurley
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  2. M. Kopycinska-Müller
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  3. A. B. Kos
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Hurley, D.C., Kopycinska-Müller, M. & Kos, A.B. Mapping mechanical properties on the nanoscale using atomic-force acoustic microscopy. JOM 59, 23–29 (2007). https://doi.org/10.1007/s11837-007-0005-8

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  • DOI: https://doi.org/10.1007/s11837-007-0005-8

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