Nanoscale waveguiding methods

Open Access
Nano Review


While 32 nm lithography technology is on the horizon for integrated circuit (IC) fabrication, matching the pace for miniaturization with optics has been hampered by the diffraction limit. However, development of nanoscale components and guiding methods is burgeoning through advances in fabrication techniques and materials processing. As waveguiding presents the fundamental issue and cornerstone for ultra-high density photonic ICs, we examine the current state of methods in the field. Namely, plasmonic, metal slot and negative dielectric based waveguides as well as a few sub-micrometer techniques such as nanoribbons, high-index contrast and photonic crystals waveguides are investigated in terms of construction, transmission, and limitations. Furthermore, we discuss in detail quantum dot (QD) arrays as a gain-enabled and flexible means to transmit energy through straight paths and sharp bends. Modeling, fabrication and test results are provided and show that the QD waveguide may be effective as an alternate means to transfer light on sub-diffraction dimensions.


Nanophotonics Negative dielectric Waveguides Quantum dots Diffraction limit 

[1, 2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23, 24, 25, 26, 27, 28, 29, 30, 31, 32, 33, 34, 35, 36, 37, 38, 39, 40, 41, 42, 43, 44, 45, 46, 47, 48, 49, 50, 51, 52, 53, 54, 55, 56]



We gratefully acknowledge funding from the National Science Foundation (NSF) ADVANCE program, and UW Royalty Research Fund. C.-J. Wang would like to thank the NSF Graduate and the Intel Foundation Ph.D. Fellowship Programs for financial support. Work was performed in part at the University of Washington Nanotech User Facility (NTUF), a member of the National Nanotechnology Infrastructure Network (NNIN), which is supported by the National Science Foundation.


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© to the authors 2007

Authors and Affiliations

  1. 1.Department of Electrical EngineeringUniversity of WashingtonSeattleUSA

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