Skip to main content
SpringerLink
Log in

Effect of Nano-Sized TiN Additions on the Electrical Properties of Vacuum Cold Sprayed SiC Coatings

  • Peer Reviewed
  • Published:
Journal of Thermal Spray Technology Aims and scope Submit manuscript

Abstract

Three different contents of nano-sized TiN powers of 20 nm in size were added to nano-sized SiC powders of 40 nm. Vacuum cold spray (VCS) process was used to deposit SiC-TiN composite coatings on Al2O3 substrates. Microstructure and phase structure analysis of the samples was performed by scanning electron microscopy (SEM) and x-ray diffraction (XRD). Sheet resistance of the VCS coatings was measured using a four-point probe method. The influences of TiN additions on the electrical resistivity of SiC-TiN composite coatings and the conductive mechanisms were investigated. The electrical resistivity of SiC-TiN coatings decreases with increasing TiN contents, reaching a minimum of 1.82 Ω m with 50 mol% TiN.

This is a preview of subscription content, log in via an institution to check access.

Access this article

Log in via an institution

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Institutional subscriptions

Fig. 1
Fig. 2
Fig. 3
Fig. 4
Fig. 5
Fig. 6
Fig. 7
Fig. 8
Fig. 9
Fig. 10
Fig. 11
Fig. 12

Similar content being viewed by others

References

  1. J.-C. Zhou, X.-Q. Zheng, and F. Liu, The Latest Research Progress of SiC Films and Devices Membrane, Mater. Rev., 2007, 21(3), p 112-118 (in Chinese)

    Google Scholar 

  2. G.-S. Chung and J.-H. Ahn, Characterization of Polycrystalline 3C-Sic Thin Film Diodes for Extreme Environment Applications, Microelectron. Eng., 2008, 85, p 1772-1775

    Article  CAS  Google Scholar 

  3. X.-Y. Cui, Development of SiC and Its Process, J. Rev. Prospect, 2007, 25(4), p 58-62 (in Chinese)

    Google Scholar 

  4. R.-H. Yu and M.-X. Jiang, The Properties and Applications of TiN and the Fabrication Methods of TiN Powders, Refract. Mater., 2005, 39(5), p 386-389 (in Chinese)

    CAS  MathSciNet  Google Scholar 

  5. J.-G. Li, L. Gao, and J.-Q. Guo, Mechanical Properties and Electrical Conductivity of Tin-Al2O3, J. Inorg. Mater., 2002, 17(6), p 1215-1219 (in Chinese)

    CAS  Google Scholar 

  6. Y. Hoshide, A. Tabata, A. Kitagawa, and A. Kondo, Preparation of N-Type Nanocrystalline 3C-Sic Films by Hot-Wire CVD Using N2 as Doping Gas, Thin Solid Films, 2009, 517, p 3524-3527

    Article  CAS  ADS  Google Scholar 

  7. C. Serrea, D. Pankninb, A. Pérez-Rodrígueza, A. Romano-Rodrígueza, J.R. Morantea, R. Köglerb, W. Skorupab, J. Estevec, and M.C. Aceroc, Ion Beam Synthesis of N-Type Doped Sic Layers, Appl. Surf. Sci., 2001, 184, p 367-371

    Article  ADS  Google Scholar 

  8. J.-C. Zhou and X.-Q. Zheng, Structure and Electronic Properties of Sic Thin-Films Deposited by RF Magnetron Sputtering, Trans. Nonferrous Met. Soc. China, 2007, 17, p 373-377

    Article  CAS  Google Scholar 

  9. Z. Tian, I.A. Salama, N.R. Quick, and A. Kar, Effects of Different Laser Sources and Doping Methods Used to Dope Silicon Carbide, J. Acta Mater. Inc, 2005, 53(9), p 2835-2844

    Article  CAS  Google Scholar 

  10. J. Akedo, Aerosol Deposition of Ceramic Thick Films at Room Temperature—Densification Mechanism of Ceramic Layer, J. Am. Ceram. Soc., 2006, 89(6), p 1834-1839

    Article  CAS  Google Scholar 

  11. H.J. Kim, Y.J. Yoon, J.H. Kim, and S.M. Nam, Application of Al2O3-Based Polyimide Composite Thick Films to Integrated Substrates Using Aerosol Deposition Method, Mater. Sci. Eng. B, 2009, 161, p 104-108

    Article  CAS  Google Scholar 

  12. J.-J. Choi, B.-D. Hahn, J. Ryu, W.-H. Yoon, B.-K. Lee, and D.-S. Park, Preparation and Characterization of Piezoelectric Ceramic-Polymer Composite Thick Films by Aerosol Deposition for Sensor Application, Sens. Actuators A, 2009, 153, p 89-95

    Article  Google Scholar 

  13. N.D. Cuong, D.-J. Kim, B.-D. Kang, C.S. Kim, and S.-G. Yoon, Characterizations of High Resistivity TiN x O y Thin Films for Applications in Thin Film Resistors, Microelectron. Reliab., 2007, 47, p 752-754

    Article  CAS  Google Scholar 

  14. Y.-Y. Wang, Y. Liu, C.J. Li, G.J. Yang, J.J. Feng, and K. Kusumoto, Effect of Microstructure on the Electrical Properties of Nano-Structured TiN Coatings Deposited by Vacuum Cold Spray, Proceedings of the 4th Asian Thermal Spray Conference, China, October 22-24, 2009, p 392-398

  15. G. Zhao, T. Zhang, T. Zhang, J. Wang, and G. Han, Electrical and Optical Properties of Titanium Nitride Coatings Prepared by Atmospheric Pressure Chemical Vapor Deposition, J. Non-Cryst. Solids, 2008, 354, p 1272-1275

    Article  CAS  ADS  Google Scholar 

  16. S.-Q. Fan, G.-J. Yang, C.-J. Li, G.-J. Liu, C.-X. Li, and L.-Z. Zhang, Characterization of Microstructure of Nano-TiO2 Coating Deposited by Vacuum Cold Spraying, J. Therm. Spray Techn., 2006, 15(4), p 513-517

    Article  CAS  ADS  Google Scholar 

  17. G.-L. Sun, G.-H. Xia, and P.-J. Li, The Composition of SiC Electrical Heating Ceramic and Electric Conductivity, J. Ceram. Stud., 1999, 14(4), p 9-14 (in Chinese)

    Google Scholar 

  18. K.-X. Liao, Influence of Powder Structure and Accelerating Gas Flow on Electron Transport Property of Nanostructured TiO2 Films Deposited by Vacuum Cold Spray, Master thesis, Xi’an Jiaotong University, May 2010, p 28-31

Download references

Acknowledgment

The present research project was supported by National Natural Science Foundation of China (Granted No. 50705075).

Author information

Authors and Affiliations

  1. State Key Laboratory for Mechanical Behavior of Materials, Xi’an Jiaotong University, Shaanxi, 710049, China

    Y. Liu, Y.-Y. Wang, G.-J. Yang & J.-J. Feng

  2. Department of Mechanical Systems Engineering, Engineering Faculty of Gunma University, Gunma, 376-0052, Japan

    K. Kusumoto

Authors
  1. Y. Liu
    View author publications

    You can also search for this author in PubMed Google Scholar

  2. Y.-Y. Wang
    View author publications

    You can also search for this author in PubMed Google Scholar

  3. G.-J. Yang
    View author publications

    You can also search for this author in PubMed Google Scholar

  4. J.-J. Feng
    View author publications

    You can also search for this author in PubMed Google Scholar

  5. K. Kusumoto
    View author publications

    You can also search for this author in PubMed Google Scholar

Corresponding author

Correspondence to Y.-Y. Wang.

Additional information

This article is an invited paper selected from presentations at the 4th Asian Thermal Spray Conference (ATSC 2009) and has been expanded from the original presentation. ATSC 2009 was held at Nanyang Hotel, Xi’an Jiaotong University, Xi’an, China, October 22-24, 2009, and was chaired by Chang-Jiu Li.

Rights and permissions

Reprints and permissions

About this article

Cite this article

Liu, Y., Wang, YY., Yang, GJ. et al. Effect of Nano-Sized TiN Additions on the Electrical Properties of Vacuum Cold Sprayed SiC Coatings. J Therm Spray Tech 19, 1238–1243 (2010). https://doi.org/10.1007/s11666-010-9544-6

Download citation

  • Received:

  • Revised:

  • Published:

  • Issue Date:

  • DOI: https://doi.org/10.1007/s11666-010-9544-6

Keywords

Search

Navigation