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Optical constants of Bi2Te3 and Sb2Te3 measured using spectroscopic ellipsometry

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Abstract

In this work, we present the optical constants of bismuth telluride (Bi2Te3), and antimony telluride (Sb2Te3) determined using spectroscopic ellipsometry (SE). The spectral range of the optical constants is from 404 nm to 740 nm. Bi2Te3 and Sb2Te3 films with different thicknesses were grown by metalorganic chemical vapor deposition (MOCVD). Multiple sample analysis (MSA) technique was employed in order to eliminate the parameter correlation in the SE data analysis caused by the presence of the overalyer on top of Bi2Te3 and Sb2Te3 films. Optical constants and thicknesses for both Bi2Te3 and Sb2Te3 overlayers were also determined. Independent Bi2Te3 and Sb2Te3 samples were used to check the results obtained. In addition, SE analysis was performed on two Sb2Te3 samples after being etched in diluted NH4OH solution in order to characterize the overlayer and confirm the reliability of the results.

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Authors and Affiliations

  1. Electrical, Computer and Systems Engineering Department, Rensselaer Polytechnic Institute, 12180-3590, Troy, NY, USA

    Hao Cui & I. B. Bhat

  2. Research Triangle Institute, Research Triangle Park, 27709, NC, USA

    R. Venkatasubramanian

Authors
  1. Hao Cui
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  2. I. B. Bhat
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  3. R. Venkatasubramanian
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Cui, H., Bhat, I.B. & Venkatasubramanian, R. Optical constants of Bi2Te3 and Sb2Te3 measured using spectroscopic ellipsometry. J. Electron. Mater. 28, 1111–1114 (1999). https://doi.org/10.1007/s11664-999-0247-z

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  • DOI: https://doi.org/10.1007/s11664-999-0247-z

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