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From Transparent Conducting Material to Gas-Sensing Application of SnO2:Sb Thin Films

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Abstract

Transparent conductive thin films of nanocrystalline tin oxide:antimony (SnO2:Sb) were deposited on a preheated glass substrate at 400°C via spray pyrolysis technique. The effects of Sb doping concentration on morphological, structural and optical properties of the films were investigated by ultraviolet (UV)-visible absorption, x-ray diffraction (XRD) and scanning electron microscopy (SEM) techniques. The XRD study revealed that all the films had a polycrystalline nature, which increased with the Sb doping up to 4 wt.% and then decreased with further Sb doping. Similarly, the SEM images highlighted that the grain size of the SnO2:Sb thin films increased with Sb doping from 2 wt.% to 4 wt.% and then decreased for 6 wt.%. UV–visible study demonstrated that the average transmission in the visible region was found to vary from 35% to 75% depending on the Sb doping concentration. As a proof of concept, we implemented the SnO2:Sb thin films with different Sb doping for gas-sensing applications. To measure the selectivity of the SnO2:Sb thin films, the Sb-doped and -undoped films were exposed to different types of gases with varied concentration. The results of this work demonstrated that the SnO2:Sb thin film-based gas sensor had a high potential for NH3 at a low temperature (100°C). In addition, long-term stability of the SnO2:Sb thin film-based sensor was measured at 100 ppm NH3 for 90 days.

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Authors and Affiliations

  1. Department of Physics, University of Guilan, Rasht, Iran

    Soheila Hemmatzadeh Saeedabad, Seyed Mohammad Rozati & Yaser Tavakoli

  2. Institute of Fundamental and Frontier Sciences, University of Electronic Science and Technology of China, Chengdu, 610054, People’s Republic of China

    Gurpreet Singh Selopal

  3. Institut National de la Recherche Scientifique, Centre Énergie, Matériaux et Télécommunications, 1650 Boul. Lionel Boulet, Varennes, QC, J3X 1S2, Canada

    Gurpreet Singh Selopal

  4. SENSOR Lab, Department of Information Engineering, University of Brescia, Via Valotti 9, 25133, Brescia, Italy

    Giorgio Sberveglieri

  5. CNR-INO SENSOR Lab, Via Branze 45, 25123, Brescia, Italy

    Giorgio Sberveglieri

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  1. Soheila Hemmatzadeh Saeedabad
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  2. Gurpreet Singh Selopal
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  3. Seyed Mohammad Rozati
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  5. Giorgio Sberveglieri
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Correspondence to Seyed Mohammad Rozati.

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Saeedabad, S.H., Selopal, G.S., Rozati, S.M. et al. From Transparent Conducting Material to Gas-Sensing Application of SnO2:Sb Thin Films. J. Electron. Mater. 47, 5165–5173 (2018). https://doi.org/10.1007/s11664-018-6404-5

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