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Structure and Manufacturing Process of MnO2 Counter Electrode in Niobium Suboxide Capacitors

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Abstract

The influence of iterative heat treatment of impregnated aqueous Mn(NO3)2 solution on the microstructure of the produced MnO2 has been investigated in the fabrication process for niobium suboxide capacitors. We separate the whole process into two stages: At the early stage of impregnations in Mn(NO3)2 solution (with specific density less than 1.35 g/cm3), the produced MnO2 grains with equiaxed nanocrystalline morphology are mainly located in the inner space and pores, avoiding the performance deterioration due to the electrical conductivity anisotropy of columnar texture in NbO capacitors. For impregnation in Mn(NO3)2 solutions with specific density greater than 1.35 g/cm3, MnO2 grains in the inner space and pores continue to grow and present a hexagonal pyramid shape. At this stage, MnO2 starts to be produced on the outer surface of pellets and exhibits a cluster morphology that consists of MnO2 grains with size between 30 nm and 80 nm. The electrical performance of NbO capacitors has been optimized by adjusting the impregnation times and sequence. By alternately impregnating in Mn(NO3)2 solutions with specific densities of 1.23 g/cm3 and 1.35 g/cm3, MnO2 grains are better combined and the internal space of the pellets is fully filled. Impregnation in Mn(NO3)2 solutions with low specific densities (1.10 g/cm3 and 1.23 g/cm3) in dry atmosphere produces a denser MnO2 layer in the internal space, leading to improved capacitor performance.

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Authors and Affiliations

  1. Advanced Materials Institute, Graduate School at Shenzhen, Tsinghua University, Shenzhen, 518055, People’s Republic of China

    Liqin Chen & Bo Li

  2. The State Key Laboratory of New Ceramics and Fine Processing, Department of Materials Science and Engineering, Tsinghua University, Beijing, 100084, People’s Republic of China

    Liqin Chen, Bo Li, Ji Zhou & Longtu Li

  3. Shenzhen Sunlord Electronics Co., Ltd., Shenzhen, 518110, People’s Republic of China

    Zhaoxiong Qi & Hai Guo

Authors
  1. Liqin Chen
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  2. Bo Li
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  3. Zhaoxiong Qi
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  4. Hai Guo
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  5. Ji Zhou
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  6. Longtu Li
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Correspondence to Bo Li.

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Chen, L., Li, B., Qi, Z. et al. Structure and Manufacturing Process of MnO2 Counter Electrode in Niobium Suboxide Capacitors. J. Electron. Mater. 42, 2933–2939 (2013). https://doi.org/10.1007/s11664-013-2674-0

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  • DOI: https://doi.org/10.1007/s11664-013-2674-0

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