Skip to main content
SpringerLink
Log in

Topography and Dislocations in (112)B HgCdTe/CdTe/Si

  • Published:
Journal of Electronic Materials Aims and scope Submit manuscript

Abstract

Scanning electron microscopy (SEM), atomic force microscopy (AFM), and x-ray diffraction (XRD) measurements all indicate an approximate factor of ten increase in the Everson etch pit density (EPD) over standard Nomarski microscopy Everson EPD determination. A new (112)B CdTe/Si EPD etch has also been demonstrated which reduces the surface roughness of the etched epilayer and makes etch pit density determination less problematic.

This is a preview of subscription content, log in via an institution to check access.

Access this article

Log in via an institution

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Institutional subscriptions

Similar content being viewed by others

References

  1. N.K. Dhar, P.R. Boyd, M. Martinka, J.H. Dinan, L.A. Almeida, and N. Goldsman, J. Electron. Mater. 29, 748 (2000). doi:10.1007/s11664-000-0219-9

    Article  ADS  CAS  Google Scholar 

  2. For (111) CdZnTe by H. Figgemeier, J. Electron. Mater. 32, 588 (2003). doi:10.1007/s11664-003-0037-y

  3. G. A. Carini, C. Arnone, A. E. Bolotnikov, G. S. Camarda, R. E. DeWames, J. H. Dinan, J. K. Markunas, B. Raghothamacher, S. Sivananthan, R. Smith, J. Zhao, Z. Zhong, and R. B. James, J. Electron. Mater. 35, 1495 (2006). doi:10.1007/s11664-006-0291-x

    Article  ADS  CAS  Google Scholar 

  4. For Hg0.72Cd0.28Te by L.A. Almeida, M. Groenert, J. Markunas, and J.H. Dinan, J. Electron. Mater. 35, 1214 (2006). doi:10.1007/s11664-006-0243-5

    Google Scholar 

  5. D. Edwall, E. Piqutte, J. Ellsworth, J. Arias, C. H. Swartz, L. Bai, R. P. Tompkins, N. C. Giles, T. H. Myers, and M. Berding, J. Electron. Mater. 33, 752 (2004). doi:10.1007/s11664-004-0077-y

    Article  ADS  CAS  Google Scholar 

  6. For Hg0.602Cd0.398Te by M. Martinka, L.A. Almeida, J.D. Benson, and J.H. Dinan, J. Electron. Mater. 31, 732 (2002). doi:10.1007/s11664-002-0228-y

    Google Scholar 

  7. T. J. de Lyon, J. E. Jensen, M. D. Gorwitz, C. A. Cockrum, S. M. Johnson, and G. M. Venzor, J. Electron. Mater. 28, 705 (1999). doi:10.1007/s11664-999-0058-2

    Article  ADS  Google Scholar 

  8. For Cd0.96Zn0.04Te by Y.P. Chen, G. Brill, E.M. Campo, T.␣Hierl, J.C.M. Hwang, and N.K. Dhar, J. Electron. Mater. 33, 498 (2004). doi:10.1007/s11664-004-0037-6

    Google Scholar 

  9. M. Carmody, J. G. Pasko, D. Edwall, M. Darasellia, L. A. Almeida, J. Molstad, J. H. Dinan, J. K. Markunas, Y. Chen, G. Brill, and N. K. Dhar, J. Electron. Mater. 33, 531 (2004). doi:10.1007/s11664-004-0042-9

    Article  ADS  CAS  Google Scholar 

  10. M. Carmody, J. G. Pasko, D. Edwall, R. Bailey, J. Arias, S. Cabelli, J. Bajaj, L. A. Almeida, J. H. Dinan, M. Groenert, A. J. Stoltz, Y. Chen, G. Brill, and N. K. Dhar, J. Electron. Mater. 34, 832 (2005). doi:10.1007/s11664-005-0028-2

    Article  ADS  CAS  Google Scholar 

  11. S. M. Johnson, A. A. Buell, M. F. Vilela, J. M. Peterson, J. B. Varesi, M. D. Newton, G. M. Venzor, R. E. Bornfreund, W. A. Radford, E. P. G. Smith, J. P. Rosbeck, T. J. De Lyon, J. E. Jensen, and V. Nathan, J. Electron. Mater. 33, 526 (2004). doi:10.1007/s11664-004-0041-x

    Article  ADS  CAS  Google Scholar 

  12. M. Jaime-Vasquez, M. Martinka, R. N. Jacobs, and J. D. Benson, J. Electron. Mater. 36, 905 (2007). doi:10.1007/s11664-007-0128-2

    Article  ADS  CAS  Google Scholar 

  13. P. J. Taylor, W. A. Jesser, M. Martinka, K. M. Singley, J. H. Dinan, R. T. Lareau, M. C. Wood, and W. W. Clarke III, J. Vac. Sci. Technol. A 17, 1153 (1999). doi:10.1116/1.581789

    Article  ADS  CAS  Google Scholar 

  14. W. J. Everson, C. K. Ard, J. L. Sepich, B. E. Dean, G. T. Neugebauer, and H. F. Schaake, J. Electron. Mater. 24, 505 (1995). doi:10.1007/BF02657954

    Article  ADS  CAS  Google Scholar 

  15. H.F. Schaake and A.J. Lewis, Mater. Res. Soc. Symp. Proc. Vol. 14 (1983), p. 301.

  16. R. Yang, X. L. Cao, Y. F. Wei, and L. He, J. Electron. Mater. 37, 1241 (2008). doi:10.1007/s11664-008-0465-9

    Article  ADS  CAS  Google Scholar 

  17. J.E. Ayers, Hetero-Epitaxy of Semiconductors: Theory, Growth, and Characterization (New York, NY: CRC Press, 2007), pp. 332–338.

  18. K. Ishida, M. Akiyama, and S. Nishi, Jap. J. Appl. Phys. 26, L163 (1987). doi:10.1143/JJAP.26.L163

    Article  ADS  CAS  Google Scholar 

  19. K. Nakagawa, K. Maeda, and S. Takeuchi, Appl. Phys. Lett. 34, 574 (1979). doi:10.1063/1.90871

    Article  ADS  CAS  Google Scholar 

  20. J.D. Benson, R. N. Jacobs, J. K. Markunas, M. Jaime-Vasquez, P. J. Smith, L. A. Almeida, M. Martinka, M. F. Vilela, and U. Lee, J. Electron. Mater. 37, 1231 (2008). doi:10.1007/s11664-008-0469-5

    Article  ADS  CAS  Google Scholar 

Download references

Author information

Authors and Affiliations

  1. US Army RDECOM, CERDEC Night Vision and Electronic Sensors Directorate, Ft. Belvoir, VA, USA

    J. D. Benson, P. J. Smith, R. N. Jacobs, J. K. Markunas, M. Jaime-Vasquez, L. A. Almeida, A. Stoltz, L. O. Bubulac & M. Groenert

  2. US Army Research Laboratory, Adelphi, MD, USA

    P. S. Wijewarnasuriya, G. Brill, Y. Chen & U. Lee

Authors
  1. J. D. Benson
    View author publications

    You can also search for this author in PubMed Google Scholar

  2. P. J. Smith
    View author publications

    You can also search for this author in PubMed Google Scholar

  3. R. N. Jacobs
    View author publications

    You can also search for this author in PubMed Google Scholar

  4. J. K. Markunas
    View author publications

    You can also search for this author in PubMed Google Scholar

  5. M. Jaime-Vasquez
    View author publications

    You can also search for this author in PubMed Google Scholar

  6. L. A. Almeida
    View author publications

    You can also search for this author in PubMed Google Scholar

  7. A. Stoltz
    View author publications

    You can also search for this author in PubMed Google Scholar

  8. L. O. Bubulac
    View author publications

    You can also search for this author in PubMed Google Scholar

  9. M. Groenert
    View author publications

    You can also search for this author in PubMed Google Scholar

  10. P. S. Wijewarnasuriya
    View author publications

    You can also search for this author in PubMed Google Scholar

  11. G. Brill
    View author publications

    You can also search for this author in PubMed Google Scholar

  12. Y. Chen
    View author publications

    You can also search for this author in PubMed Google Scholar

  13. U. Lee
    View author publications

    You can also search for this author in PubMed Google Scholar

Corresponding author

Correspondence to J. D. Benson.

Rights and permissions

Reprints and permissions

About this article

Cite this article

Benson, J.D., Smith, P.J., Jacobs, R.N. et al. Topography and Dislocations in (112)B HgCdTe/CdTe/Si. J. Electron. Mater. 38, 1771–1775 (2009). https://doi.org/10.1007/s11664-009-0758-7

Download citation

  • Received:

  • Accepted:

  • Published:

  • Issue Date:

  • DOI: https://doi.org/10.1007/s11664-009-0758-7

Keywords

Search

Navigation