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Microstructure and Characteristics of Thin-Film La0.8Sr0.2Co0.5Ni0.5O3/ZnO:Al Heterocontact CO Sensors Prepared by RF Magnetron Sputtering

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Abstract

Highly sensitive CO gas sensors based on heterocontacts of ZnO:Al on La0.8Sr0.2Co0.5Ni0.5O3 (LSCNO) were fabricated successfully. La0.8Sr0.2Co0.5Ni0.5O3 thin films were coated on (100) silicon wafers by a sol-gel method including the Pechini process followed by a spin-coating procedure. Then, ZnO:Al films prepared by radiofrequency (RF) magnetron sputtering at various oxygen partial pressures and deposited on as-deposited La0.8Sr0.2Co0.5Ni0.5O3 films were investigated. The results revealed that the CO sensing ability of the film prepared with the ratio of O2/Ar = 5/5 (ratio of volume flow rate) was the worst, owing to the highest (002) plane orientation in the ZnO:Al film. In contrast, the ZnO:Al film prepared with O2/Ar = 3/7 exhibited better CO sensitivity. Furthermore, all two-layer samples showed higher CO sensitivities than single-layer samples. The CO sensitivity of ZnO:Al/La0.8Sr0.2Co0.5Ni0.5O3 thin film was 45% for 500 ppm CO at a sensing temperature of 200°C.

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Acknowledgement

The authors wish to thank the National Science Council of ROC for financial support under Grant No. NSC-90-2216-E-006-065.

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Authors and Affiliations

  1. Department of Chemical and Materials Engineering, National Kaohsiung University of Applied Sciences, Kaohsiung, 807, Taiwan, ROC

    Wein-Duo Yang

  2. Department of Materials Science and Engineering, National Cheng-Kung University, Tainan, 700, Taiwan, ROC

    Yen-Hwei Chang, Chia-Chia Huang & Yu-Chung Chen

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  1. Wein-Duo Yang
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  2. Yen-Hwei Chang
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Correspondence to Wein-Duo Yang.

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Yang, WD., Chang, YH., Huang, CC. et al. Microstructure and Characteristics of Thin-Film La0.8Sr0.2Co0.5Ni0.5O3/ZnO:Al Heterocontact CO Sensors Prepared by RF Magnetron Sputtering. J. Electron. Mater. 38, 460–467 (2009). https://doi.org/10.1007/s11664-008-0598-x

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