ZnO is an attractive material for ultraviolet (UV) light emitters and detectors, and transparent thin-film transistors. It is also readily synthesized in the form of nanostructures. In this paper we discuss the fabrication of a number of ZnO thin-film and nanowire devices, including transistors, diodes, and UV and pH sensors. ZnO has been effectively used as a gas sensor material based on the near-surface modification of charge distribution with surface-absorbed species. The large surface area of the nanorods makes them attractive for gas and chemical sensing, and the ability to control their nucleation sites makes them candidates for high-density sensor arrays.
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see, for example, in ZnO Bulk, Thin Films and Nanostructures, ed. C. Jagadish and S.J. Pearton (Elsevier, Oxford, UK, 2006)
J.J. Chen, F. Ren, Y.J. Li, D.P. Norton, S.J. Pearton, A. Osinsky, J.W. Dong, P.P. Chow and J.F. Weaver, Appl. Phys. Lett. 87, 192106 (2005)
X.J. Wang, I.A. Buyanova, W.M. Chen, M. Izadifard, D.P. Norton, S. Rawal, S.J. Pearton, A. Osinsky and A. Dabiran, Appl. Phys. Lett. 89, 151909 (2006)
Z.L. Wang, in ZnO Bulk, Thin Films and Nanostructures, ed. C. Jagadish and S.J. Pearton (Elsevier, Oxford, 2006)
Z.W. Pan, Z.R. Dai and Z.L. Wang, Science 2001, 291 (1947)
P.X. Gao, Y. Ding and Z.L. Wang, Nano Lett. 3, 1315 (2003)
P.X. Gao and Z.L. Wang, J. Am. Chem. Soc. 125, 11299 (2003)
Z.L. Wang, X.Y. Kong and J.M. Zuo, Phys. Rev. Lett. 91, 185502 (2003)
X.Y. Kong and Z.L. Wang, Nano Lett. 3, 1625 (2003)
X.Y. Kong, Y. Ding, R.S. Yang and Z.L. Wang, Science 303, 1348 (2004)
R.S. Yang, Y. Ding and Z.L. Wang, Nano Lett. 4, 1309 (2004)
P.X. Gao, Y. Ding, W. Mai, W.L. Hughes, C.S. Lao and Z.L. Wang, Science 309, 1700 (2005)
P.X. Gao and Z.L. Wang, Small 1, 945 (2005)
M.T. Björk, B.J. Ohlsson, T. Sass, A.I. Persson, C. Thelander, M.H. Magnusson, K. Deppert, L.R. Wallenberg and L. Samuelson, Appl. Phys. Lett. 80, 1058 (2002)
Y. Wu, R. Fan and P. Yang, Nano Lett. 2, 83 (2002)
W.I. Park, G.-C. Yi, M.Y. Kim and S.J. Pennycook, Adv. Mater. 15, 526 (2003)
L.J. Lauhon, M.S. Gudiksen, D. Wang and C.M. Lieber, Nature 420, 57 (2002)
M.H. Huang, Y.Y. Wu, H. Feick, N. Tran, E. Weber and P.D. Yang, Adv. Mater. 13, 113 (2001)
J.-H. Choy, E.S. Jang, J.H. Won, J.-H. Chung, D.-J. Jang and Y.W. Kim, Adv. Mater. 15, 1911 (2003)
X.T. Zhang, Y.C. Liu, L.G. Zhang, J.Y. Zhang, D.Z. Shen, W. Xu, G.Z. Zhong, X.W. Fan, J. Appl. Phys. 92, 3293 (2002)
S.F. Yu, C. Yuen, S.P. Lau, W.I. Park and G.-C. Yi, Appl. Phys. Lett. 84, 3241 (2004)
C. Chang, F. Tsao, C.J. Pan, G.C. Chi, H.T. Wang, J.J. Chen, F. Ren, D.P. Norton, S.J. Pearton, K.H. Chen and L.C. Chen, Appl. Phys. Lett. 88, 173503 (2006)
J. Bao, M.A. Zimmler, F. Capasso, X. Wang and Z.F. Ren, Nano Lett. 6, 1719 (2006)
J.C. Johnson, K.P. Knutsen, H.Q. Yan, M. Law, Y.F. Zhang, P.D. Yang and R.J. Saykally, Nano Lett. 4, 197 (2004)
W.I. Park and G.C. Yi, Adv. Mater. 16, 87 (2004)
H. Kind, H.Q. Yan, B. Messer, M. Law and P.D. Yang, Adv. Mater. 14, 158 (2002)
Y.W. Heo, B.S. Kang, L.C. Tien, D.P. Norton, F. Ren, J.R. LaRoche and S.J. Pearton, Appl. Phys. A 80, 497 (2005)
Y.W. Heo, L.C. Tien, Y. Kwon, S.J. Pearton, B.S. Kang, F. Ren and J.R. LaRoche, Appl. Phys. Lett. 85, 3107 (2004)
M.S. Arnold, Ph. Avouris, Z.W. Pan and Z.L. Wang, J. Phys. Chem. B 107, 659 (2003)
Y.W. Heo, L.C. Tien, Y. Kwon, D.P. Norton, S.J. Pearton, B.S. Kang and F. Ren, Appl. Phys. Lett. 85, 2274 (2004)
P.C. Chang, Z. Fan, C.J. Chen, D. Stichtenoth, C. Ronnig and J.G. Lu, Appl. Phys. Lett. 89, 133113 (2006)
W.I. Park, J.S. Kim, G.C. Yi and H.J. Lee, Adv. Mater. 17, 1393 (2005)
Z.Y. Fan, D.W. Wang, P.C. Chang, W.Y. Tseng and J.G. Lu, Appl. Phys. Lett. 85, 5923 (2004)
Z.Y. Fan and J.G. Lu, Appl. Phys. Lett. 86, 123510 (2005)
B.S. Kang, Y.W. Heo, L.C. Tien, D.P. Norton, F. Ren , B.P. Gila and S.J. Pearton, Appl. Phys. A 80, 1029 (2005)
B.S. Kang, F. Ren, Y.W. Heo, L.C. Tien, D.P. Norton and S.J. Pearton, Appl. Phys. Lett. 86, 112105 (2005)
H.T. Wang, B.S. Kang, F. Ren, L.C. Tien, P.W. Sadik, D.P. Norton, S.J. Pearton and J. Lin, Appl. Phys. Lett. 86, 243503 (2005)
L. Tien, H.T. Wang, B.S. Kang, F. Ren, P.W. Sadik, D.P. Norton, S.J. Pearton and J. Lin, Electrochem. Solid-State Lett. 8, G239 (2005)
H.T. Wang, B.S. Kang, F. Ren, L.C. Tien, P.W. Sadik, D.P. Norton, S.J. Pearton and J. Lin, Appl. Phys. A 81, 1117 (2005)
J.H. He, C.H. Hsin, L.J. Chen, Z.L. Wang, Adv. Mater. 19, 781 (2007)
L. Tien, P. Sadik, D.P. Norton, L. Voss, S.J. Pearton, H.T. Wang, B.S. Kang, F. Ren, J. Jun and J. Lin, Appl. Phys. Lett. 87, 222106 (2005)
Z.L. Wang and J.H. Song, Science 312, 242 (2006)
X. Wang, J. Song, J. Liu and Z.L. Wang, Science 316, 102 (2007)
Z.L. Wang, Adv. Mater. 19, 889 (2007)
X. Wang, J. Zhou, J. Song, J. Liu, N. Xu and Z.L. Wang, Nano Lett. 6, 2768 (2006)
J. Zhou, N. Xu and Z.L. Wang, Adv. Mater. 18, 2432 (2006)
C.S. Lao, Y. Li, C.P. Wong, and Z.L. Wang, Nano Lett. 7, 1323 (2007)
C.H. Liang, L.C. Chen, J.S. Hwang, K.H. Chen, Y.T. Hung and Y.F. Chen, Appl. Phys. Lett. 81, 22 (2002)
B. Xiang, P. Wei, X. Zhang, S. Dayeh, D.P.R. Aplin, C. Soci, D. Yu, D. Wang, Nano Lett. 7, 323 (2007)
Y. Wu and P. Yang, J. Am. Chem. Soc. 123, 3165 (2001)
Y.W. Heo, L.C. Tien, D.P. Norton, B.S. Kang, F. Ren, B.P. Gila and S.J. Pearton, Appl. Phys. Lett. 85, 2002 (2004)
K. Keem, H. Kim, G.T. Kim, J.S. Lee, B. Min, K. Cho, M.Y. Sung and S. Kim, Appl. Phys. Lett. 84, 4376 (2004)
I.A. Buyanova, J.P. Bergman, G. Pozina, W.M. Chen, S. Rawal, D.P. Norton, S.J. Pearton, A. Osinsky and J.W. Dong, Appl. Phys. Lett. 90, 261907 (2007)
Acknowledgements
The authors would like to thank B.P. Gila and M. F. Chisholm for their valuable collaborations. The work is partially supported by NSF (CTS-0301178, monitored by Dr. M. Burka and Dr. D. Senich), by NASA Kennedy Space Center Grant NAG 10-316 monitored by Mr. Daniel E. Fitch and NSF DMR 0400416.
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Pearton, S., Lim, W., Wright, J. et al. ZnO and Related Materials for Sensors and Light-Emitting Diodes. J. Electron. Mater. 37, 1426–1432 (2008). https://doi.org/10.1007/s11664-008-0416-5
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DOI: https://doi.org/10.1007/s11664-008-0416-5