Fabrication of Strained-Si/Strained-Ge Heterostructures on Insulator

Abstract

Ultrathin strained-Si/strained-Ge heterostructures on insulator have been fabricated using a bond and etch-back technique. The substrate consists of a trilayer of 9 nm strained-Si/4 nm strained-Ge/3 nm strained-Si on a 400-nm-thick buried oxide. The epitaxial trilayer structure was originally grown pseudomorphic to a relaxed Si_0.5Ge_0.5 layer on a donor substrate. Raman analysis of the as-grown and final transferred layer structures indicates that there is little change in the strain in the Si and Ge layers after layer transfer. These ultrathin Si and Ge films have very high levels of strain (∼1.8% biaxial tension and 1.4% compression, respectively), and are suitable for enhanced-mobility field-effect transistor applications.