Skip to main content
SpringerLink
Log in

Preparation of ultrasmooth and defect-free 4H-SiC(0001) surfaces by elastic emission machining

  • Special Issue Paper
  • Published:
Journal of Electronic Materials Aims and scope Submit manuscript

Abstract

In this work, elastic emission machining (EEM), which is a precise surface-preparation technique using chemical reactions between the surfaces of work and fine powder particles, is applied to the flattening 4H-SiC (0001) surface. Prepared surfaces are observed and characterized by optical interferometry, atomic force microscopy (AFM), and low-energy electron diffraction (LEED). The obtained images show that the processed surface has atomic-level flatness, and the subsurface damage and surface scratches of the preprocessed surface are almost entirely removed.

This is a preview of subscription content, log in via an institution to check access.

Access this article

Log in via an institution

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Institutional subscriptions

Similar content being viewed by others

References

  1. M. Kikuchi, Y. Takahashi, T. Suga, S. Suzuki, and Y. Bando, J. Am. Ceram. Soc. 75, 189 (1992).

    Article  CAS  Google Scholar 

  2. L. Zhou, V. Audurier, P. Pirouz, and J.A. Powell, J. Electrochem. Soc. 144, L161 (1997).

    Google Scholar 

  3. C. Li, I.B. Bhat, R. Wang, and J. Seiler, J. Electron. Mater. 33, 481 (2004).

    Google Scholar 

  4. F. Owman, C. Hallin, P. Martensson, and E. Janzen, J. Cryst. Growth 167, 391 (1996).

    Article  CAS  Google Scholar 

  5. V. Ramacandran, M.F. Brady, A.R. Smith, R.M. Feenstra, and D.W. Greve, J. Electron. Mater. 27, 308 (1998).

    Google Scholar 

  6. Y. Mori, K. Yamauchi, and K. Endo, Precision Eng. 9 123 (1987).

    Article  Google Scholar 

  7. Y. Mori, K. Yamauchi, and K. Endo, Precision Eng. 10, 24 (1988).

    Article  Google Scholar 

  8. Y. Mori, K. Yamauchi, K. Endo, T. Ide, H. Toyota, K. Nishizawa, and M. Hasegawa, J. Vac. Sci. Technol. A8, 621 (1990).

    Google Scholar 

  9. K. Yamauchi, K. Hirose, H. Goto, K. Sugiyama, K. Inagaki, K. Yamamura, Y. Sano, and Y. Mori, Comput. Mater. Sci. 14, 232 (1999).

    Article  Google Scholar 

  10. K. Yamauchi, H. Mimura, K. Inagaki, and Y. Mori, Rev. Sci. Instrum. 73, 4028 (2002).

    Article  CAS  Google Scholar 

  11. K. Yamauchi et al., Jpn. J. Appl. Phys. 42, 7129 (2003).

    Article  CAS  Google Scholar 

  12. K. Yamauchi, K. Yamamura, H. Mimura, Y. Sano, A. Saito, A. Souvorov, M. Yabashi, K. Tamasaku, T. Ishikawa, and Y. Mori, J. Synchrotron. Rad. 9, 313 (2002).

    Article  Google Scholar 

  13. H. Mimura et al., J. Synchrotron. Rad. 11, 343 (2004).

    Article  Google Scholar 

  14. Y. Mori et al., Proc. SPIE 4501, 30 (2001).

    Article  CAS  Google Scholar 

Download references

Author information

Authors and Affiliations

  1. Department of Precision Science and Technology, Graduate School of Engineering, Osaka University, 565-0871, Osaka, Japan

    Akihisa Kubota, Hidekazu Mimura, Kouji Inagaki, Kenta Arima & Kazuto Yamauchi

  2. Research Center for Ultra-Precision Science and Technology, Graduate School of Engineering, Osaka University, Japan

    Yuzo Mori

Authors
  1. Akihisa Kubota
    View author publications

    You can also search for this author in PubMed Google Scholar

  2. Hidekazu Mimura
    View author publications

    You can also search for this author in PubMed Google Scholar

  3. Kouji Inagaki
    View author publications

    You can also search for this author in PubMed Google Scholar

  4. Kenta Arima
    View author publications

    You can also search for this author in PubMed Google Scholar

  5. Yuzo Mori
    View author publications

    You can also search for this author in PubMed Google Scholar

  6. Kazuto Yamauchi
    View author publications

    You can also search for this author in PubMed Google Scholar

Rights and permissions

Reprints and permissions

About this article

Cite this article

Kubota, A., Mimura, H., Inagaki, K. et al. Preparation of ultrasmooth and defect-free 4H-SiC(0001) surfaces by elastic emission machining. J. Electron. Mater. 34, 439–443 (2005). https://doi.org/10.1007/s11664-005-0124-3

Download citation

  • Received:

  • Accepted:

  • Issue Date:

  • DOI: https://doi.org/10.1007/s11664-005-0124-3

Key words

Search

Navigation