Abstract
This paper presents a comparative study of the optical properties of (AlGa)As grown by LP-MOVPE using hydrogen purified by the conventional method, the Pd-cell, and getter-purified hydrogen. The electrical characteristics could not be determined. The free carrier concentration in the 1.3 m thick layers must therefore be lower than 1015cm−3, so that the layer thickness did not exceed the depletion layer thickness. The optical characteristics of the layers depend similarly on the variation of growth parameters and are comparable and state of the rat for both purification techniques. The suitability of getter purification for hydrogen as the carrier gas in MOVPE is therefore demonstrated.
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Hardtdegen, H., Schmidt, r., Wirtz, K. et al. On the suitability of getter-purified hydrogen for the LP-MOVPE of (AlGa)As: A comparison to Pd-diffused hydrogen. J. Electron. Mater. 30, 1397–1401 (2001). https://doi.org/10.1007/s11664-001-0190-0
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DOI: https://doi.org/10.1007/s11664-001-0190-0