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Cycling Effect on Morphological and Interfacial Properties of RuO2 Anode Film in Thin-Film Lithium Ion Microbatteries

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Abstract

This work presents a comprehensive study on the effects of lithiation/delithiation process (discharge/charge cycling) on the structure, morphologies, and nanomechanical and interfacial properties of sputtered RuO2 film, which is used as anode in thin-film lithium ion batteries. Various techniques including ex situ X-ray diffraction (XRD), atomic force microscope (AFM), nanoindentation tests combining with focused ion beaming (FIB) sectioning, and scanning electron microscope (SEM), are used in this study. The results reveal significant changes in the surface morphology and roughness of the anode film because of the large volume changes induced by the phase transformation involving Li+. It also shows that the electrode film mechanically fails because of the repeated volume changes and this process is related to the generation/relaxation of stress during the discharge/charge cycling. The induced stress in the film intensifies the initiation and propagation of microcracks, as well as the interfacial delamination. The morphological and nanomechanical property changes have harmful effects on the electrical contact between the film and the substrate, resulting in the degradation of battery.

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Acknowledgments

The authors thank the Institute of Materials Research and Engineering (IMRE), Singapore for the help of nanoindentation experiments. The authors also thank Dr. Mengfei Wong and Dr. Jinkui Feng for help with AFM and sputtering experiments. This work was supported by the Agency for Science, Technology and Research (A*STAR), Singapore on research project 0721340051 (R-265-000-292-305) and by the Ministry of Education, Singapore through the National University of Singapore under Academic Research Funds (R265-000-305-112).

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Correspondence to Kaiyang Zeng.

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Manuscript submitted March 24, 2011.

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Zhu, J., Zeng, K. & Lu, L. Cycling Effect on Morphological and Interfacial Properties of RuO2 Anode Film in Thin-Film Lithium Ion Microbatteries. Metall Mater Trans A 44 (Suppl 1), 26–34 (2013). https://doi.org/10.1007/s11661-011-0847-0

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