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Crystal Structure and Dielectric Characterization of a (SrTiO3/BaTiO3) n Multilayer Film Prepared by Radio Frequency Magnetron Sputtering

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Abstract

(SrTiO3/BaTiO3) n multilayer films with Pt bottom and top electrodes have been prepared by a double target radio frequency (RF) magnetron sputtering, and their dielectric properties have been characterized as a function of temperature, frequency, bias voltage, and applied voltage. The X-ray diffraction (XRD) pattern reveals that the deposited (SrTiO3/BaTiO3) n multilayer films have a designed modulation. The interfaces within the multilayer films appear smooth and dense without any microcracks, and the adhesion is very good. The dielectric constant of the (SrTiO3/BaTiO3) n multilayer film increases with increasing layer number (n), and the leakage current density is less than 1 × 10−8 A·cm−2 for the applied voltage less than 5 V for the 450-nm-thick (SrTiO3/BaTiO3) n multilayer films. The remanent polarization (P r ) and the coercive field (E c ) of the 350-nm-thick (SrTiO3/BaTiO3)4 multilayer films are 7 μC·cm−2 and 60 kV·cm−1, respectively, exhibiting ferroelectricity. (SrTiO3/BaTiO3)4 multilayer films have a high E c and a lower P r , as compared with the bulk BaTiO3 single crystal. The 450-nm-thick (SrTiO3/BaTiO3)4 multilayer films have a leakage current density-voltage characteristic, which makes them suitable for application in DRAMs capacitors.

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  1. JEOL is a trademark of Japan Electron Optics Ltd., Tokyo.

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Acknowledgments

This work was supported by the National Science Council (Taiwan, Republic of China), under Contract Nos. NSC 89-2216-E-151-011 and NSC 97-2221-E-006-223, which are grateful acknowledged. Help with experimental work and suggestions from Professors M.P. Hung and M.H. Hon, Ms. L.J. Wang, and Mr. J.M. Chen are deeply appreciated.

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Authors and Affiliations

  1. Institute of Nanotechnology and Microsystems Engineering, National Cheng Kung University, Tainan, Taiwan R.O.C.

    Wang-Long Li (Associate Professor)

  2. Department of Materials Science and Engineering, National Cheng Kung University, Tainan, Taiwan R.O.C.

    Fu-Yuan Hsiao (Master) & Nan-Chung Wu (Professor)

  3. Department of Materials Science and Engineering, National United University, Miao-li, Taiwan R.O.C.

    Huey-Jiuan Lin (Professor)

  4. Department of Fragrance and Cosmetic Science, Kaohsiung Medical University, Kaohsiung, Taiwan R.O.C.

    Moo-Chin Wang (Professor)

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  1. Wang-Long Li
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  2. Huey-Jiuan Lin
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  3. Fu-Yuan Hsiao
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Correspondence to Moo-Chin Wang.

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Manuscript submitted June 14, 2008.

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Li, WL., Lin, HJ., Hsiao, FY. et al. Crystal Structure and Dielectric Characterization of a (SrTiO3/BaTiO3) n Multilayer Film Prepared by Radio Frequency Magnetron Sputtering. Metall Mater Trans A 41, 1330–1337 (2010). https://doi.org/10.1007/s11661-010-0174-x

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