Abstract
Ni0.4Cu0.2Zn0.4Fe2O4 thin films were fabricated on Si substrates by using the sol-gel method and rapid thermal annealing (RTA), and their magnetic properties and crystalline structures were investigated. The samples calcined at and above 600 °C have a single-phase spinel structure and the average grain size of the sample calcined at 600°C is about 20 nm. The initial permeability μ i , saturation magnetization M s and coercivity H c of the samples increase with the increasing calcination temperature. The sample calcined at 600°C exhibits an excellent soft magnetic performance, which has μ i =33.97 (10 MHz), H c=15.62 Oe and M s=228.877 emu/cm3. Low-temperature annealing can enhance the magnetic properties of the samples. The work shows that using the sol-gel method in conjunction with RTA is a promising way to fabricate integrated thin-film devices.
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References
Nakamura T. Low-Temperature Sintering of Ni-Zn-Cu Ferrite and Its Permeability Spectra [J]. J. Magn. Magn. Mate., 1997, 168: 285–291
Li Bo, Yue Zhen-Xing, Qi Xi-Wei, et al. High Mn Content NiCuZn Ferrite for Multilayer Chip Inductor Application [J]. Mater. Sci. Eng. B., 2003, 99: 252–254
Tsay C Y, Liu K S, Lin T F, et al. Microwave Sintering of NiCuZn Ferrites and Multilayer Chip Inductors [J]. J. Magn. Magn. Mate., 2000, 209: 189–192
Gao Jianhua, Cui Yitao, Yang Zheng. The Magnetic Properties of NixZn1−x Fe2O4 Films Fabricated by Alternative Sputtering Technology [J]. Mater. Sci. Eng. B, 2004, 110: 111–114
Matsushita N, Chong C P, Mizutani T, et al. Stress-Indued Magnetization for Epitaxial Spinel Ferrite Films through Interface Engineering [J]. Appl. Phys. Lett., 2004, 85: 1 199–1 121
Matsushita N, Chong C P, Mizutani T, et al. High-Rate Low-Temperature (90°C) Deposition of Ni-Zn Ferrite Films Highly Permeable in Gigahertz Range [J]. IEEE Trans. On Magn., 2002, 38: 3 156–3 158
Shimada Y, Matsushita N, Masanori Abe, et al. Study on Initial Permeability of Ni-Zn Ferrite Films Prepared by the Spin Spray Method [J]. J. Magn. Magn. Mate., 2004, 278: 256–262
Sakka S. Science in Sol-Gel Method [M]. Agune, Tokyo, 1998
Dong Li-jie, Xiong Chuan-xi, Chen Juan, et al. Dielectric Behavior of BaTiO3/PVDF Nanocomposites In-situ Synthesized by the Sol-Gel Method [J]. Journal of Wuhan University of Technology-Materials Science Edition, 2004, 19: 9–11
Kim S J, Jeong K H, Kim C S. Crystallographic and Magnetic Properties of CoAl0.2Fe1.8O4 Thin Films Prepared by a Sol-Gel Method [J]. IEEE Trans. on Magn., 2002, 38: 2 628–2 630
Stephen A Campbell. The Science and Engineering of Microelectronic Fabrication[M]. Beijing: Publishing House of Electronics Industry, 2003(in Chinese)
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Funded by the National Natural Science Foundation of China (No. 90607021).
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Liu, F., Ren, T., Yang, C. et al. Magnetic properties of NiCuZn ferrite thin films prepared by the sol-gel method. J. Wuhan Univ. Technol. 22, 506–509 (2007). https://doi.org/10.1007/s11595-006-3506-3
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DOI: https://doi.org/10.1007/s11595-006-3506-3