Abstract
The effects of different substrates on the structure and hydrogen evolution from a-Si: H thin films deposited by plasma enhanced chemical vapour deposition were studied, as well as the similar films exposed to an hydrogen plasma. Spectroscopic ellipsometry and hydrogen evolution measurements were used to analyse the effects of the substrate and hydrogen plasma on the films microstructure, thickness, hydrogen content, hydrogen bonding and hydrogen evolution. The hydrogen evolution spectra show a strong substrate dependence. In particular on crystalline silicon substrate, the formation of bubbles was observed. For different substrates, hydrogen plasma treatments lightly affected the hydrogen evolution spectra. These results indicate that the action of hydrogen in a-Si:H was modified by the nature of the substrate.
This is a preview of subscription content, log in via an institution to check access.
Similar content being viewed by others
References
O Vetterl, A Lambertz, A Dasgupta, et al. Thickness Dependence of Microcrystalline Silicon Solar Cell Properties[J]. Sol. Energy Mater. Sol. Cells, 2001, 66:345
L Feitknecht, O Kluth, Y Ziegler, et al. Sol. Microcrystalline n-i-p Solar Cells Deposited at 10 Å/s by VHF-GD[J]. J. Energy Mater. Sol. Cells, 2001, 66:397
Ming Wu, Y Chen, K Pangal, et al. High-performance Polysilicon Thin Film Transistors on Steel Substrates[J]. J. Non-Cryst. Solids, 2003, 266–269:1 284
A Fontcuberta i Morral, P Roca i Cabarrocas. Etching and Hy drogen Diffusion Mechanisms During a Hydrogen Plasma Treat ment of Silicon Thin Films[J]. J. Non-Cryst. Solids, 2002, 299part A:196
P A Fedders.Energetics of the Forms of Hydrogen and Hydrogen Difussion in Realistic Models of a-Si:H [J].J. Non-Cryst. Solids, 2002,299part A:201
W B Jackson, A J Franz, H C Jin, et al. Determination of the Hydrogen Density of States in Amorphous Hydrogenated Silicon[J]. J. Non-Cryst. Solids, 1998,230part A:143
W Beyer. Incorporation and Thermal Stability of Hydrogen in Amorphous Silicon and Germanium[J]. J. Non-Cryst. Solids, 1996,198–200:40
J Farjas, D Das, J Fort, et al. Calorimetry of Hydrogen Desorption from a-Si Nanoparticles [J].Phys. Rev. B, 2002,65:115 403
A Fontcuberta i Morral, P Roca i Cabarrocas, C Clerc.Structure and Hydrogen Content of Polymorphous Silicon Thin Films Studied by Spectroscopic Ellipsometry and Nuclear Measurements[J]. Phys. Rev. B, 2004,69:125 307
R Biswas, Q M Li.Low-temperature Growth on Si(111)Substrates[J].Phys. Rev. B, 1994,50:18 090
Author information
Authors and Affiliations
Rights and permissions
About this article
Cite this article
Rao, R. Preparation and properties of a-Si:H thin films deposited on different substrates. J. Wuhan Univ. Technol. 22, 126–128 (2007). https://doi.org/10.1007/s11595-005-1126-y
Received:
Accepted:
Issue Date:
DOI: https://doi.org/10.1007/s11595-005-1126-y