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Fabrication of Plasmonic Nanoparticles on a Wave Shape PDMS Substrate

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Abstract

In this paper, we report on detailed fabrication process and analytical studies of plasmonic nanoparticles on flexible substrates of polydimethylsiloxane (PDMS) that are fabricated with non-flat, wavy features of surface relief. The fabrication process, like making patterns of nanocircle particles by using PDMS stamp, etching patterns in a silicon wafer, and transferring metal nanoparticles from the silicon substrate to a sinusoidal wavy elastomer PDMS substrate, is described, and this flexible material can be used to mechanically control the inter-particle spacing by applying strain, then this device’s optical properties at different strain values are characterized also. The tunability of optical resonance peaks is observed at near-infrared wavelengths with different stain values.

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Acknowledgments

The authors gratefully acknowledge Prof. J. A. Rogers, and Dr. Hui Fang for help and discussion at the Frederick Seitz Materials Research Laboratory in UIUC. This research is supported by China Scholarship Council (CSC), the National Natural Science Foundation of China (No. 61573039).

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Correspondence to Di Feng.

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Feng, D., Zhang, H., Xu, S. et al. Fabrication of Plasmonic Nanoparticles on a Wave Shape PDMS Substrate. Plasmonics 12, 1627–1631 (2017). https://doi.org/10.1007/s11468-016-0427-7

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  • DOI: https://doi.org/10.1007/s11468-016-0427-7

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