Research progress on ultra-precision machining technologies for soft-brittle crystal materials
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Soft-brittle crystal materials are widely used in many fields, especially optics and microelectronics. However, these materials are difficult to machine through traditional machining methods because of their brittle, soft, and anisotropic nature. In this article, the characteristics and machining difficulties of soft-brittle and crystals are presented. Moreover, the latest research progress of novel machining technologies and their applications for softbrittle crystals are introduced by using some representative materials (e.g., potassium dihydrogen phosphate (KDP), cadmium zinc telluride (CZT)) as examples. This article reviews the research progress of soft-brittle crystals processing.
Keywordsbrittle soft functional crystal ultra-precision machining
This work was funded by the National Natural Science Foundation of China (Grant No. 51135002) and Science Fund for Creative Research Groups (Grant No. 51321004). The authors are grateful to Professor Bi Zhang for proofreading the manuscript.
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