Abstract
Micro-sensors are fabricated by co-electrospinning In2O3 and SnO2 nanofibers on the substrates of SiO2/Si with interdigitated Pt signal electrodes. The total sensor area is 1.36 mm × 0.55 mm and the active area is only 0.63 mm × 0.55 mm. Excellent NH3 sensing properties are obtained based on the sensors at room temperature. The sensitivity is at most 28 when the sensors are exposed to NH3 of 10 ppm. The response time is 8 s or so and the recovery time is nearly 2 s. Not only fine selectivity, but also long-time stability is obtained. The results not only demonstrate the obtained micro-sensors are very promising devices for NH3 detection, but also show a possible route for large-scale NH3 sensor fabrication at the industrial level.
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Acknowledgments
This work was supported by the National Natural Science Foundation of China (61106050, 21201022, 61205038), the Science Foundation for Young Scholars of Changchun University of Science and Technology (XQNJJ-2011-12), the Scientific and Technological Development Project of Jilin Province (201101103, 201201121, 20120435, 20130203033GX) and the Scientific and Technological Pillar Project of Changchun (11KZ38).
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Liang, Q., Li, D., Gao, S. et al. Room-temperature NH3 sensors with high sensitivity and short response/recovery times. Chin. Sci. Bull. 59, 447–451 (2014). https://doi.org/10.1007/s11434-013-0018-3
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DOI: https://doi.org/10.1007/s11434-013-0018-3