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Microstructures of the interlayer in Mo/Si multilayers induced by proton irradiation

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Abstract

In this work, the microstructure and optical properties of the Mo/Si multilayers mirror for the space extreme-ultraviolet solar telescope before and after 100 keV proton irradiation have been investigated. EUV/soft X-ray reflectometer (EXRR) results showed that, after proton irradiation, the reflectivity of the Mo/Si multilayer decreased from 12.20% to 8.34% and the center wavelength revealed red shift of 0.38 nm, as compared with those before proton irradiation. High-resolution transmission electron microscopy (HRTEM) observations revealed the presence of MoSi2, Mo3Si and Mo5Si3 in Mo-on-Si interlayers before irradiation. The preferred orientation such as MoSi2 with (101) texture and Mo5Si3 with (310) texture was formed in Mo-on-Si interlayers after proton irradiation, which led to the increase of thickness in the interlayers. It is suggested that the changes of microstructures in Mo/Si multilayers under proton irradiation could cause optical properties degradation.

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Authors and Affiliations

  1. School of Materials Science & Engineering, Jiangsu University, Zhenjiang, 212013, China

    Peng Lv, ZaiQiang Zhang & QingFeng Guan

  2. State Key Laboratory of Applied Optics, Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, Changchun, 130033, China

    XiaoDong Wang & Bo Chen

  3. Space Materials and Environment Engineering Laboratory, Harbin Institute of Technology, Harbin, 150001, China

    Hai Liu

  4. Faculty of Science, Jiangsu University, Zhenjiang, 212013, China

    JinTong Guan

Authors
  1. Peng Lv
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  2. XiaoDong Wang
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  3. Hai Liu
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  4. ZaiQiang Zhang
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  5. JinTong Guan
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  6. Bo Chen
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  7. QingFeng Guan
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Correspondence to QingFeng Guan.

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Lv, P., Wang, X., Liu, H. et al. Microstructures of the interlayer in Mo/Si multilayers induced by proton irradiation. Sci. China Phys. Mech. Astron. 55, 2194–2198 (2012). https://doi.org/10.1007/s11433-012-4908-1

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  • DOI: https://doi.org/10.1007/s11433-012-4908-1

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