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Influence of Thermal Annealing on the Properties of Multilayer Mo/Be Mirrors

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Abstract

The influence of thermal action on X-ray optics performance and structure of films and transition regions in multilayer Mo/Be mirrors optimized for a reflection maximum in the interval 11.2–11.4 nm at normal incidence has been considered. The annealing temperature reached 300°C and the annealing time was 1 and 4 h. It has been shown that after thermal annealing in vacuum for 1 h at 300°C, the reflection coefficient rises; however, when the annealing time grows to 4 h, it drops. Grains in molybdenum films become finer, and the profiles of transition regions change from exponential to linear. The period of multilayer mirrors has remained the same under all annealing conditions.

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Funding

This study was supported by the Russian Foundation for Basic Research (grant nos. 17-52-150006 and 18-02-00588) and was done in accordance with state task no. 0035 2014-0204 for the Institute of Physics of Microstructures, Russian Academy of Sciences, using equipment from the Common Use Center, Institute of Physics of Microstructures.

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Authors and Affiliations

  1. Institute for Physics of Microstructures, Russian Academy of Sciences, 607680, Nizhny Novgorod, Russia

    R. M. Smertin, S. A. Garakhin, S. Yu. Zuev, A. N. Nechai, V. N. Polkovnikov, N. N. Salashchenko, M. V. Svechnikov, N. I. Chkhalo & P. A. Yunin

  2. Helmholtz-Zentrum Berlin, D-12489, Berlin, Germany

    M. G. Sertsu, A. Sokolov & F. Schäfers

Authors
  1. R. M. Smertin
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  2. S. A. Garakhin
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  3. S. Yu. Zuev
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  4. A. N. Nechai
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  5. V. N. Polkovnikov
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  6. N. N. Salashchenko
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  7. M. V. Svechnikov
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  8. M. G. Sertsu
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  9. A. Sokolov
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  10. N. I. Chkhalo
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  11. F. Schäfers
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  12. P. A. Yunin
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Correspondence to R. M. Smertin.

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Translated by V. Isaakyan

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Smertin, R.M., Garakhin, S.A., Zuev, S.Y. et al. Influence of Thermal Annealing on the Properties of Multilayer Mo/Be Mirrors. Tech. Phys. 64, 1692–1697 (2019). https://doi.org/10.1134/S1063784219110252

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  • DOI: https://doi.org/10.1134/S1063784219110252

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