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Ferroelectric-like behaviors of metal-insulator-metal with amorphous dielectrics

  • Research Paper
  • Special Topic: Recent Progress of Fundamental Research on Post-Moore Novel Devices
  • Published:
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Abstract

In this paper, unique ferroelectric-like characteristics in amorphous (a-) ZrO2-based devices enabled by mobile ions are systematically investigated at room temperature and cryogenic. The physical origin of the ferroelectric-like behaviors of the metal/a-ZrO2/metal capacitor is confirmed to be the migration of ions exhibiting strong frequency dependency due to the limited velocity of the mobile ions, which is proven by the comparison between experimental results and theoretical analysis. The ferroelectric-type hysteresis will be reduced sharply with the decrease of the temperature, which is essentially different from the reported doped-HfO2 FeFET. This further confirms that the origin of the ferroelectric-like characteristics is the migration and redistribution of the mobile ions.

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Acknowledgements

This work was supported by National Key Research and Development Project (Grant No. 2022ZD0119002), National Natural Science Foundation of China (Grant Nos. 62204226, 62025402, 62090033, 91964202, 62204229, 62204228), Major Scientific Research Project of Zhejiang Lab (Grant No. 2021MD0AC01), and Zhejiang Province Key R&D Programs (Grant Nos. 2022C01232, 2021C05004).

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Authors and Affiliations

  1. Research Center for Intelligent Chips, Zhejiang Lab, Hangzhou, 311121, China

    Huan Liu, Jiajia Chen, Chengji Jin, Xiao Yu & Genquan Han

  2. School of Microelectronics, Xidian University, Xi’an, 710071, China

    Huan Liu, Yan Liu & Genquan Han

Authors
  1. Huan Liu
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  2. Jiajia Chen
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  3. Chengji Jin
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  4. Xiao Yu
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  5. Yan Liu
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  6. Genquan Han
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Correspondence to Xiao Yu or Yan Liu.

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Liu, H., Chen, J., Jin, C. et al. Ferroelectric-like behaviors of metal-insulator-metal with amorphous dielectrics. Sci. China Inf. Sci. 66, 200410 (2023). https://doi.org/10.1007/s11432-023-3759-x

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  • DOI: https://doi.org/10.1007/s11432-023-3759-x

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