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Laser wavelength effects on (Ti, Al, Si)N in near-field laser nanostructuring by micron optical fiber enhanced irradiation

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Abstract

The effects of laser wavelengths (1064, 532, 355 and 266 nm) on nano-processing of fabricating a groove structure on (Ti, Al, Si)N alloy film using the micro-fiber near-field enhanced irradiation are investigated. It is observed that variations of laser wavelength can effectively change the widths of the groove structures, which are featured as one-dimension bowl-like structures. The minimum of the groove width can be achieved at 293 nm with a 532 nm laser inducing. In order to fabricate the groove in nanoscale, enough energy is delivered onto (Ti, Al, Si)N surface by a single laser pulse. Simulation results are also discussed to understand the experimental results.

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Authors and Affiliations

  1. State Key Laboratory of Tribology, Tsinghua University, Beijing, 100084, China

    DaMeng Liu, JiaChen Liu, Hui Wang, Kang Su & TianMin ShaO

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  1. DaMeng Liu
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  2. JiaChen Liu
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  3. Hui Wang
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  4. Kang Su
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  5. TianMin ShaO
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Correspondence to DaMeng Liu.

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Liu, D., Liu, J., Wang, H. et al. Laser wavelength effects on (Ti, Al, Si)N in near-field laser nanostructuring by micron optical fiber enhanced irradiation. Sci. China Technol. Sci. 56, 3012–3016 (2013). https://doi.org/10.1007/s11431-013-5407-y

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  • DOI: https://doi.org/10.1007/s11431-013-5407-y

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