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InP based DFB laser array integrated with MMI coupler

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Abstract

The techniques used for the fabrication of photonic integrated circuit (PIC) chip are introduced briefly. Then a four channel DFB laser array integrated with MMI coupler and semiconductor optical amplifier (SOA) fabricated with butt-joint technique, varied ridge width and holographic exposure techniques is reported.

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Authors and Affiliations

  1. Key Laboratory of Semiconductor Materials Science, Institute of Semiconductors, Chinese Academy of Sciences, Beijing, 100083, China

    HongLiang Zhu, Li Ma, Song Liang, Can Zhang, BaoJun Wang, LingJuan Zhao & Wei Wang

  2. Department of Electronic Engineering, Tsinghua University, Beijing, 100084, China

    Li Ma

Authors
  1. HongLiang Zhu
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  2. Li Ma
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  3. Song Liang
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  4. Can Zhang
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  5. BaoJun Wang
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  6. LingJuan Zhao
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  7. Wei Wang
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Correspondence to HongLiang Zhu.

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Zhu, H., Ma, L., Liang, S. et al. InP based DFB laser array integrated with MMI coupler. Sci. China Technol. Sci. 56, 573–578 (2013). https://doi.org/10.1007/s11431-012-5118-9

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  • DOI: https://doi.org/10.1007/s11431-012-5118-9

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