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A selective area growth double stack active layer electroabsorption modulator integrated with a distributed feedback laser

  • Articles / High-Speed Optoelectronics
  • Published:
Chinese Science Bulletin

Abstract

A new method for fabricating electroabsorption modulator integrated with a distributed feedback laser (EML) was proposed. With the method we fabricated a selective area growth double stack active layer EML (SAG-DSAL-EML). Through comparing with other fabrication methods of EMLs, the characters and the merits of the new method presented in this paper were discussed.

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Authors and Affiliations

  1. Key Laboratory of Semiconductor Materials, Institute of Semiconductor, Chinese Academy of Sciences, Beijing, 100083, China

    HongLiang Zhu, Song Liang, LingJuan Zhao, DuanHua Kong, NingHua Zhu & Wei Wang

Authors
  1. HongLiang Zhu
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  2. Song Liang
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  3. LingJuan Zhao
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  4. DuanHua Kong
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  5. NingHua Zhu
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  6. Wei Wang
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Corresponding author

Correspondence to HongLiang Zhu.

Additional information

Supported by the National High-Tech Research and Development Program of China (Grant Nos. 2001AA312050, 2005AA31g060 and 2007AA-03Z417)

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Zhu, H., Liang, S., Zhao, L. et al. A selective area growth double stack active layer electroabsorption modulator integrated with a distributed feedback laser. Chin. Sci. Bull. 54, 3627–3632 (2009). https://doi.org/10.1007/s11434-009-0605-5

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  • DOI: https://doi.org/10.1007/s11434-009-0605-5

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