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Incremental FIB-DIC Ring-Core Methods for the Residual Stress Measurement of Bilayer Thin Films

  • Sp Iss: Advances in Residual Stress Technology
  • Published:
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Abstract

Background

The thin film coating and the microsystem device’s reliability can be strongly affected by residual stress; thus, accurate residual stress measurement in thin films is important.

Objective

This study conducted residual stress measurement to provide a viable semi-destructive method for evaluating the residual stress of bilayer thin film.

Methods

A model for analyzing residual stress in elastically isotropic bilayer thin film was developed by combining the usage of Focused Ion Beam—Digital Image Correlation (FIB-DIC) with finite element (FE) modeling calculated calibration coefficients. The relaxation stress of thin film can be revealed with corresponding milling depth.

Results

Residual stress results of ZrN/Zr bilayer thin films were measured with the implementation of FE analysis calibration coefficients and the resulting strain release. A comparison between the collected results with other studies was performed to prove the practicality and applicability of this method.

Conclusions

This study showed that the residual stress of each layer of the bilayer thin film corresponded to its deposition conditions. Therefore, the residual stress of the bilayer thin film could be measured using the proposed Incremental FIB-DIC ring-core method.

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Acknowledgements

This work was supported by the Ministry of Science and Technology, Taiwan under grant number MOST 110 -2218 -E- 005- 017.

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Authors and Affiliations

  1. Graduate Institute of Precision Engineering, National Chung Hsing University, Taichung, 402, Taiwan

    N.M. Dang, W.-Y. Ku, Z.-Y. Wang, C.-H. Lin & M.-T. Lin

  2. Department of Mechanical Engineering, National Cheng Kung University, Tainan, 70101, Taiwan

    T.Y.-F. Chen

  3. Aeronautical Systems Research Division, National Chung-Shan Institute of Science and Technology, Taichung, 407, Taiwan

    C.-H. Lin

  4. iCenter for Advanced Science Technology, National Chung Hsing University, Taichung, 407, Taiwan

    M.-T. Lin

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  1. N.M. Dang
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Correspondence to M.-T. Lin.

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Dang, N., Ku, WY., Wang, ZY. et al. Incremental FIB-DIC Ring-Core Methods for the Residual Stress Measurement of Bilayer Thin Films. Exp Mech 62, 1489–1499 (2022). https://doi.org/10.1007/s11340-022-00877-z

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  • DOI: https://doi.org/10.1007/s11340-022-00877-z

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