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Fabricating Parameters Optimization of High Frequency Grating by Multi-scanning Electron Beam Method

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Abstract

The electron-beam moiré method uses a high frequency grating to measure microscopic deformation. Increasingly fine gratings are being developed to achieve increasingly high resolutions in microscopic stress analysis. In this study, we improve the electron grid fabricating technique by using a common scanning electron microscope (SEM). An error analysis for the multi-scanning grating was performed by a sampling moiré method. The grating manufacturing parameters strongly affect the superfine grating quality. A high accelerating voltage or a short working distance yield better results generally. A set of optimal parameters is suggested based on a minimum-error criterion. A cross-line grid with a frequency of 10,000 lines/mm and a parallel grating with a frequency of 13,000 lines/mm were successfully fabricated.

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Acknowledgments

The authors are grateful for support from the National Natural Science Foundation of China (Nos. 10972097 and 11062007), the Natural Science Foundation of Inner Mongolia of China (No. 010MS0703) and the Research Fund for the Doctoral Program of Higher Education of China (No.20101514120005).

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Authors and Affiliations

  1. School of Civil Engineering, Inner Mongolia University of Technology, Hohhot, 010051, China

    Y. R. Zhao

  2. State Key Laboratory of Structural Analysis for Industrial Equipment, Dalian University of Technology, Dalian, 116024, China

    Z. K. Lei

  3. Department of Applied Mechanics, Inner Mongolia University of Technology, Hohhot, 010051, China

    Y. M. Xing

  4. College of Materials Science and Engineering, Inner Mongolia University of Technology, Hohhot, 010051, China

    X. H. Hou & P. C. Bai

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  1. Y. R. Zhao
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  2. Z. K. Lei
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  3. Y. M. Xing
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  4. X. H. Hou
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  5. P. C. Bai
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Correspondence to Y. M. Xing.

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Zhao, Y.R., Lei, Z.K., Xing, Y.M. et al. Fabricating Parameters Optimization of High Frequency Grating by Multi-scanning Electron Beam Method. Exp Mech 54, 45–55 (2014). https://doi.org/10.1007/s11340-013-9742-5

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  • DOI: https://doi.org/10.1007/s11340-013-9742-5

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