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Fabrication Technique of Deformation Carriers (Gratings and Speckle Patterns) with FIB for Microscale/Nanoscale Deformation Measurement

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FIB Nanostructures

Part of the book series: Lecture Notes in Nanoscale Science and Technology ((LNNST,volume 20))

Abstract

The fabrication technique of deformation carriers with focused ion beam (FIB) milling for microscale/nanoscale deformation measurement has been studied in this chapter. The deformation carriers refer to microscale/nanoscale gratings and speckle patterns, which are indispensable elements for moiré and digital image correlation (DIC) method under scanning electron microscope (SEM) respectively. The fabrication principle, the design, and the influencing factors of these two kinds of deformation carriers are studied respectively. Their successful applications to microscale/nanoscale deformation measurement are also presented, which demonstrate that the deformation carriers combined with photo-mechanics techniques under SEM are effective tools for microscale/nanoscale deformation measurement.

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Acknowledgements

The authors are grateful to the financial supported by the National Basic Research Program of China (“973” Project) (Grant Nos. 2010CB631005, 2011CB606105), the National Natural Science Foundation of China (Grant Nos. 11232008, 91216301, 11227801, 11172151), Specialized Research Fund for the Doctoral Program of Higher Education (Grant No.20090002110048), Tsinghua University Initiative Scientific Research Program, the Initiative Scientific Research Program, and the Doctoral Program of University of Jinan (Grant No. XBS 1307).

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Authors and Affiliations

  1. School of Civil Engineering and Architecture, University of Jinan, Jinan, 250022, China

    Yanjie Li

  2. AML, Department of Engineering Mechanics, Tsinghua University, Beijing, 100084, China

    Yanjie Li & Huimin M. Xie

  3. National Institute for Materials Science, 1-2-1 Sengen, Tsukuba, Ibaraki, 305-0047, Japan

    Qinghua H. Wang

  4. School of Aerospace Engineering, Beijing Institute of Technology, Beijing, 100081, China

    Zhanwei W. Liu

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  1. Yanjie Li
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  2. Huimin M. Xie
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  3. Qinghua H. Wang
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  4. Zhanwei W. Liu
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Correspondence to Huimin M. Xie .

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  1. State Key Laboratory of Electronic, University of Electronic Science and Technology, Chengdu, People's Republic of China

    Zhiming M. Wang

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Li, Y., Xie, H.M., Wang, Q.H., Liu, Z.W. (2013). Fabrication Technique of Deformation Carriers (Gratings and Speckle Patterns) with FIB for Microscale/Nanoscale Deformation Measurement. In: Wang, Z. (eds) FIB Nanostructures. Lecture Notes in Nanoscale Science and Technology, vol 20. Springer, Cham. https://doi.org/10.1007/978-3-319-02874-3_10

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