Abstract
Mechanical characterization of sub-micron thin films or similar small scale structures have been a continuous challenge to the mechanics community due to the difficulty in accurately quantizing the applied load and the resulted deformation. In this paper, a new force-domain analog-to-digital converter (F-D ADC) created from the concept of Flash ADC in electronics is developed to perform thin film tensile tests. The key component of the F-D ADC is a quantizer-array of microfabricated buckling beams of varying lengths. During testing, the tensile force applied in the test specimen is converted to the compressive force in the quantizer beam array and digitized by using the critical buckling load of the beams as they progressively buckle with increasing force amplitude. The deformation of the specimen is controlled by the piezoelectric actuator. Successful testing of (110) single crystal silicon and titanium/nickel (Ti/Ni) multilayer thin film specimens demonstrated the feasibility of this novel F-D ADC concept.
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Sharpe WN, Bagdahn J, Jackson K, Coles G (2003) Tensile testing of MEMS materials—recent progress. J Mater Sci 38(20):4075–4079
Pharr GM, Oliver WC (1992) Measurement of thin-film mechanical-properties using nanoindentation. MRS Bull 17(7):28–33
Neubrand A, Hess P (1992) Laser generation and detection of surface acoustic-waves—elastic properties of surface-layers. J Appl Phys 71(1):227–238
Kiesewetter L, Zhang JM, Houdeau D, Steckenborn A (1992) Determination of Young moduli of micromechanical thin-films using the resonance method. Sensors Actuators A Phys 35(2):153–159
Osterberg PM, Senturia SD (1997) M-TEST: a test chip for MEMS material property measurement using electrostatically actuated test structures. J Microelectromech Syst 6(2):107–118
Sharpe WN (1968) Interferometric strain gage. Exp Mech 8(4):164
Sharpe WN (1982) Applications of the interferometric strain displacement gauge. Opt Eng 21(3):483–488
Sharpe WN, Yuan B, Edwards RL (1997) A new technique for measuring the mechanical properties of thin films. J Microelectromech Syst 6(3):193–199
Sharpe WN, Turner KT, Edwards RL (1999) Tensile testing of polysilicon. Exp Mech 39(3):162–170
LaVan DA, Sharpe WN (1999) Tensile testing of microsamples. Exp Mech 39(3):210–216
Sharpe WN (2003) Murray lecture—Tensile testing at the micrometer scale: opportunities in experimental mechanics. Exp Mech 43(3):228–237
Hemker KJ, Sharpe WN (2007) Microscale characterization of mechanical properties. Annu Rev Mater Res 37:93–126
Tsuchiya T, Tabata O, Sakata J, Taga Y (1998) Specimen size effect of tensile strength of surface-micromachined polycrystalline silicon thin films. J Microelectromech Syst 7(1):106–113
Chasiotis I, Knauss WG (2002) A new microtensile tester for the study of MEMS materials with the aid of atomic force microscopy. Exp Mech 42(1):51–57
Knauss WG, Chasiotis I, Huang Y (2003) Mechanical measurements at the micron and nanometer scales. Mech Mater 35(3–6):217–231
Haque MA, Saif MTA (2001) Microscale materials testing using MEMS actuators. J Microelectromech Syst 10(1):146–152
Haque MA, Saif MTA (2002) In-situ tensile testing of nano-scale specimens in SEM and TEM. Exp Mech 42(1):123–128
Haque MA, Saif MTA (2002) Application of MEMS force sensors for in situ mechanical characterization of nano-scale thin films in SEM and TEM. Sensors Actuators A Phys 97–8:239–245
Haque MA, Saif MTA (2002) Mechanical behavior of 30–50 mn thick aluminum films under uniaxial tension. Scr Mater 47(12):863–867
Haque MA, Saif MTA (2003) A review of MEMS-based microscale and nanoscale tensile and bending testing. Exp Mech 43(3):248–255
Haque MA, Saif MTA (2005) In situ tensile testing of nanoscale freestanding thin films inside a transmission electron microscope. J Mater Res 20(7):1769–1777
Haque MA, Saif MTA (2005) Thermo-mechanical properties of nano-scale freestanding aluminum films. Thin Solid Films 484(1–2):364–368
Zhu Y, Moldovan N, Espinosa HD (2005) A microelectromechanical load sensor for in situ electron and x-ray microscopy tensile testing of nanostructures. Appl Phys Lett 86(1)
Zhu Y, Corigliano A, Espinosa HD (2006) A thermal actuator for nanoscale in situ microscopy testing: design and characterization. J Micromech Microeng 16(2):242–253
Lu SN, Dikin DA, Zhang SL, Fisher FT, Lee J, Ruoff RS (2004) Realization of nanoscale resolution with a micromachined thermally actuated testing stage. Rev Sci Instrum 75(6):2154–2162
Maloberti F (2007) Data converters. Springer, dordrecht
Waltari ME, Halonen KAI (2002) Circuit techniques for low-voltage and high-speed A/D converters. Kluwer Academic Publishers, Dordrecht
Davis JR (2004) Tensile Testing, 2nd edn. ASM International, Materials Park
Hopcroft MA, Nix WD, Kenny TW (2010) What is the Young’s modulus of silicon? J Microelectromech Syst 19(2):229–238
ASM-International (2002) Atlas of stress-strain curves, 2nd edn. ASM International, Materials Park
Gere JM, Timoshenko SP (1997) Mechanics of materials, 4th edn. Cengage Learning, Toronto
Lindberg U, Soderkvist J, Lammerink T, Elwenspoek M (1993) Quasi-buckling of micromachined beams. J Micromech Microeng 3(4):183–186
Chiao M, Lin L (1997) Microactuators based on electrothermal expansion of clamped—clamped beams. In 1997 ASME International Mechanical Engineering Congress and Exposition, Proceedings of Micro-Electro-Mechanical Systems (MEMS). Dallas, Texas
Fang W, Wickert JA (1994) Post buckling of micromachined beams. J Micromech Microeng 4(3):116–122
Saif MTA (2000) On a tunable bistable MEMS—theory and experiment. J Microelectromech Syst 9(2):157–170
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Yeh, WF., Wang, J. A Force Domain Analog-to-Digital Converter Applied to Microscale Tensile Test. Exp Mech 53, 795–806 (2013). https://doi.org/10.1007/s11340-012-9693-2
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DOI: https://doi.org/10.1007/s11340-012-9693-2