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Analysis of ARROW Waveguide Based Microcantilever for Sensing Application

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Abstract

Analysis of microcantilever beam and anti-resonant reflecting optical waveguide (ARROW) microcantilever waveguides are presented in this work. The silicon nitride material is used to generate microcantilever beams in which varying electric voltage is applied to create the deformation and thus leads to displacement of the beam due to bending of the cantilever tip. Thereby, an integration of micro electro mechanical systems (MEMS) cantilever and ARROW waveguide produced a new ARROW microcantilever waveguide reasonable for obtaining a high quality factor, electric filed intensity and sensitivity. These parameters are analyzed by varying the air gap distance between cantilever waveguide and output waveguide. Especially, maximum finite-difference time-domain (FDTD) sensitivity is reached to 73.78 nm/RIU for the proposed ARROW microcantilever waveguide.

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Acknowledgements

The authors would like to thank Principal and Management of SVIT, Bangalore and also VTU, Belagavi, Karnataka for inculcating the research culture.

Funding

The research was funded by VGST IT, BT and ST GOK, Grant No. VGST/CSIEE.GRD/466.

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Authors and Affiliations

  1. Department of Electronics and Communication Engineering, Sai Vidya Institute of Technology, Bangalore, Affiliated to Visvesvaraya Technological University, Belagavi, India

    K. Asha, Narayan Krishnaswamy & N. K. Suryanarayana

Authors
  1. K. Asha
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  2. Narayan Krishnaswamy
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  3. N. K. Suryanarayana
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Contributions

Conceptualization of the work: KA; methodology, KA.; validation, KA., KS; writing—original draft preparation, KA.; writing—review and editing, NKS; supervision, KN; project administration, KN.; funding acquisition, KN.

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Correspondence to K. Asha.

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Asha, K., Krishnaswamy, N. & Suryanarayana, N.K. Analysis of ARROW Waveguide Based Microcantilever for Sensing Application. Wireless Pers Commun 126, 3435–3453 (2022). https://doi.org/10.1007/s11277-022-09872-y

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