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Effect of lubricant on tribo-induced phase transformation of Si

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Abstract

Phase transformation behaviors of single crystal silicon lubricated by different fluids were investigated under the boundary lubricated regime. SEM and Raman micro-spectrometer results indicated that two major factors including viscosity and hydrogen bond of lubricant influence the phase transformation of single crystal silicon, and only the lubricant with relative high viscosity and weak hydrogen bond facilitates the phase transformation of Si-I→Si-II→a-Si (amorphous silicon) under boundary lubricated regime. As a result of the experiments reported here, pentadecane could be selected as a suitable lubricant to fabricate a smooth amorphous silicon surface.

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Acknowledgment

The authors are grateful to National Science Foundation of China (No. 50572107 and No. 50172052) for financial supporting. The authors also thank Ms. Ke Zhu for the Raman testing.

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Authors and Affiliations

  1. State Key Laboratory of Solid Lubrication, Lanzhou Institute of Chemical Physics, Chinese Academy of Sciences, Lanzhou, 730000, P.R. China

    X. Li, J. Lu & S. Yang

  2. Graduate School of the Chinese Academy of Sciences, Beijing, 100039, P.R. China

    X. Li

Authors
  1. X. Li
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  2. J. Lu
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  3. S. Yang
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Correspondence to J. Lu.

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Li, X., Lu, J. & Yang, S. Effect of lubricant on tribo-induced phase transformation of Si. Tribol Lett 24, 61–66 (2006). https://doi.org/10.1007/s11249-006-9145-1

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