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Subsurface damage in single-crystal silicon due to grinding and polishing

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Journal of Materials Science Letters

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References

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Authors and Affiliations

  1. Centre for Advanced Materials Technology, Department of Mechanical and Mechatronic Engineering, The University of Sydney, NSW 2006, Australia

    I. Zarudi & L. Zhang

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  1. I. Zarudi
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  2. L. Zhang
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Zarudi, I., Zhang, L. Subsurface damage in single-crystal silicon due to grinding and polishing. J Mater Sci Lett 15, 586–587 (1996). https://doi.org/10.1007/BF00579258

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  • DOI: https://doi.org/10.1007/BF00579258

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