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Adhesion and Friction Studies of a Selectively Micro/Nano-textured Surface Produced by UV Assisted Crystallization of Amorphous Silicon

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This paper presents a novel methodology of producing selectively micro/nano-textured surfaces for applications in micro/nano-electro-mechanical systems, and friction and adhesion/stiction studies on the micro/nano-textured surfaces. The selective textures were produced by ultraviolet-assisted aluminum-induced crystallization of plasma-enhanced chemical vapor deposited amorphous silicon. Friction and adhesion/stiction studies were conducted using a TriboIndenter. The results show that the surface texturing technique significantly reduces both adhesion/stiction forces and coefficients of friction.

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Authors and Affiliations

  1. Department of Mechanical Engineering, University of Arkansas, Fayetteville, AR, 72701, USA

    M. Zou & H. Wang

  2. Department of Electrical Engineering, University of Arkansas, Fayetteville, AR, 72701, USA

    L. Cai

  3. Hysitron, Inc., 10025 Valley View Road, Minneapolis, MN, 55344, USA

    D. Yang & T. Wyrobek

Authors
  1. M. Zou
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  2. L. Cai
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  3. H. Wang
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  4. D. Yang
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  5. T. Wyrobek
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Correspondence to M. Zou.

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Zou, M., Cai, L., Wang, H. et al. Adhesion and Friction Studies of a Selectively Micro/Nano-textured Surface Produced by UV Assisted Crystallization of Amorphous Silicon. Tribol Lett 20, 43–52 (2005). https://doi.org/10.1007/s11249-005-7791-3

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  • DOI: https://doi.org/10.1007/s11249-005-7791-3

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