Abstract
Surface nano-texturing has attracted great attention due to its potential for significantly reducing adhesion and friction in micro-electro-mechanical systems (MEMS) and nano-electro-mechanical systems (NEMS). However, severe deformation of the nano-textures was also observed during tribological testing of nano-textured surfaces (NTSs). Therefore, understanding the mechanical properties and deformation behavior of nano-textures and nano-textured surfaces is of critical importance to the development of durable NTSs for MEMS/NEMS applications. Here, we review our recent work in understanding the mechanical properties and deformation behavior of Ni nanodot-patterned surfaces (NDPSs) on silicon substrates. First, the benefit of nanoscale surface-texturing for MEMS/NEMS application and the size-dependent mechanical properties of nanostructures are introduced. Second, various experimental techniques are described, which include methods of fabricating and characterizing Ni NDPSs as well as studying the mechanical properties and deformation behavior of NDPSs using nanoindentation. Third, methods of determining mechanical properties of Ni nanodots from nanoindentation experiments are presented. Fourth, a multi-asperity contact model for studying the nanoindentation deformation behavior of the Ni NDPSs is described. Fifth, simulation results from the multi-asperity contact model are compared to nanoindentation experiments and validated by the experimental results. Finally, the model is used to study effects of substrate, surface roughness, elastic modulus, and yield strength.
Access this chapter
Tax calculation will be finalised at checkout
Purchases are for personal use only
References
Roukes, M.: Nanoelectromechanical systems face the future. Phys. World 14(2), 25–31 (2001)
Kim, S.H., Asay, D.B., Dugger, M.T.: Nanotribology and MEMS. Nano Today 2(5), 22–29 (2007)
Komvopoulos, K.: Adhesion and friction forces in microelectromechanical systems: mechanisms, measurement, surface modification techniques, and adhesion theory. J. Adhes. Sci. Technol. 17(4), 477–517 (2003)
Van Spengen, W.M., Puers, R., De Wolf, I.: On the Physics of stiction and its impact on the reliability of microstructures. J. Adhes. Sci. Technol. 17(4), 563–582 (2003)
Williams, J.A., Le, H.R.: Tribology and MEMS. J.Phy. D 39(12), 201–214 (2006). (Applied Physics)
Bhushan, B.: Tribology issues and opportunities in MEMS, p. 109. Kluwer Academic, Dordrecht (1998)
Douglass, M.R.: “Lifetime estimates and unique failure mechanisms of the digital micromirror device (DMD),” 1998 IEEE International Reliability Physics Symposium Proceedings 36th Annual, pp. 9–16. Anonymous IEEE, New York (1998)
Hornbeck, L.J.: The DMDTM projection display chip: A MEMS-based technology. MRS Bull. 26(4), 325–327 (2001)
Bhushan, B.: Adhesion and stiction: Mechanisms, measurement techniques, and methods for reduction. J. Vac. Sci. Technol. B, Microelectron. Nanometer Struct. 21(6), 2262–2296 (2003)
Maboudian, R., Carraro, C.: Surface engineering for reliable operation of MEMS devices. J. Adhes. Sci. Technol. 17(4), 583–591 (2003)
Maboudian, R., Carraro, C.: Surface chemistry and tribology of MEMS. Annu. Rev. Phys. Chem. 55, 35–54 (2004)
Zhao, Y.: Stiction and anti-stiction in MEMS and NEMS. Acta Mechanica Sinica 19(1), 1–10 (2003). (English Series)
Maboudian, R., Howe, R.T.: Critical review: Adhesion in surface micromechanical structures. J. Vac. Sci.Technol. B, Microelectron. Process. Phenom. 15(1), 1–1 (1997)
Ando, Y., Ino, J.: Friction and pull-off force on silicon surface modified by FIB. Sens. Actuators, A 57(2), 83–89 (1996)
Ando, Y.: “The effect of relative humidity on friction and pull-off forces measured on submicron-size asperity arrays,” The 2nd International Colloquium on Micro-Tribology, September 15, 1997—September 18, 238, pp. 12–19. Anonymous Elsevier S.A, Janowice (2000)
Gerberich, W.W., Mook, W.M., Perrey, C.R.: Superhard silicon nanospheres. J. Mech. Phys. Solids 51(6), 979–992 (2003)
Choi, C., Kim, J., and Kim, C.:”Nanoturf surfaces for reduction of liquid flow drag in microchannels,” 3rd ASME Integrated Nanosystems Conference—Design, Synthesis, and Applications, September 22, 2004—September 24, pp. 47–48. Anonymous American Society of Mechanical Engineers, Pasadena (2004)
Song, Y., Premachandran Nair, R., Zou, M.: Adhesion and friction properties of micro/nano-engineered superhydrophobic/hydrophobic surfaces. Thin Solid Films 518(14), 3801–3807 (2010)
Nair, R.P., Zou, M.: Surface-Nano-texturing by aluminum-induced crystallization of amorphous silicon. Surf. Coat. Technol. 203(5–7), 675–679 (2008)
Zou, M., Wang, H., Larson, P.R.: Ni Nanodot-patterned surfaces for adhesion and friction reduction. Tribol. Lett. 24(2), 137–142 (2006)
Zou, M., Cai, L., Wang, H.: Adhesion and friction studies of a nano-textured surface produced by spin coating of colloidal silica nanoparticle solution. Tribol. Lett. 21(1), 25–30 (2006)
Zou, M., Cai, L., Wang, H.: Adhesion and Friction Studies of a Selectively micro/nano-textured surface produced by UV assisted crystallization of amorphous silicon. Tribol. Lett. 20(1), 43–52 (2005)
Morton, B. D., Wang, H., Fleming, R. A.,: Nanoscale surface engineering with deformation-resistant core-shell nanostructures, pp. 1–8 (2011)
Yoon, E., Singh, R.A., Kong, H.: Tribological properties of bio-mimetic nano-patterned polymeric surfaces on silicon wafer. Tribol. Lett. 21(1), 31–37 (2006)
Burton, Z., Bhushan, B.: Hydrophobicity, adhesion, and friction properties of nanopatterned polymers and scale dependence for micro- and nanoelectromechanical systems. Nano Lett. 5(8), 1607–1613 (2005)
Zou, M., Seale, W., and Wang, H.: “Comparison of Tribological Performances of Nano- and Micro-Textured Surfaces,” Proceedings of the Institution of Mechanical Engineers, Part N (J Nanoeng Nanosystems). 219(3):103–10 (2005)
Wang, H., Premachandran Nair, R., Zou, M.: Friction study of a Ni Nanodot-oatterned surface. Tribol. Lett. 28(2), 183–189 (2007)
Nix, W.D.: Elastic and plastic properties of thin films on substrates: Nanoindentation techniques. Mater. Sci. Eng., A A234–23, 37–44 (1997)
Shugurov, A., Panin, A., Chun, H.-G.:”Size effects on the mechanical properties of thin metallic films studied by nanoindentation,” 8th Korea–Russia International Symposium on Science and Technolog, vol. 3, pp. 168–72. Anonymous IEEE, Piscataway (2004)
Son, D., Jeong, J., Kwon, D.: Film-thickness considerations in microcantilever-beam test in measuring mechanical properties of metal thin film. Thin Solid Films 437(1–2), 182–187 (2003)
Kracke, B., Damaschke, B.: Measurement of Nanohardness and Nanoelasticity of thin gold films with scanning force microscope. Appl. Phys. Lett. 77(3), 361–363 (2000)
Schaefer, D.M., Patil, A., Andres, R.P.: Nanoindentation of a supported Au cluster. Appl. Phys. Lett. 63(11), 1492–1494 (1993)
Schaefer, D.M., Patil, A., Andres, R.P.: Elastic properties of individual nanometer-size supported gold clusters. Physical Review B 51(8), 5322–5332 (1995). (Condensed Matter)
Wang, H., Zou, M., Larson, P. R.: Nanomechanical Properties of a Ni Nanodot-Patterned Surface. Nanotechnology, 19(29), (2008)
Wang, H., Zou, M., Jackson, R.L.: Nanoindentation modeling of a Nanodot-patterned surface on a deformable substrate. Int. J. Solids Struct. 47(22–23), 3203–3213 (2010)
Loo, Y., Willett, R.L., Baldwin, K.W.: Additive, nanoscale patterning of metal films with a stamp and a surface chemistry mediated transfer process: applications in plastic electronics. Appl. Phys. Lett. 81(3), 562–562 (2002)
Donthu, S.K., Pan, Z., Shekhawat, G.S.: Near-field scanning optical microscopy of ZnO nanopatterns fabricated by micromolding in capillaries. J. Appl. Phys. 98(2), 1–5 (2005)
Juang, J.Y., Bogy, D.B.: Nanotechnology advances and applications in information storage. Microsyst. Technol. 11(8–10), 950–957 (2005)
Di Fabrizio, E., Cojoc, D., Cabrini, S.:”Nano-optical elements fabricated by e-beam and x-ray lithography,” nano- and micro-optics for information systems, August 3,4 2003, 5225, pp. 113–125. Anonymous SPIE, San Diego (2003)
Murillo, R., Van Wolferen, H.A., Abelmann, L.: “Fabrication of patterned magnetic nanodots by laser interference lithography,” Proceedings of the 30th International Conference on Micro- and Nano-Engineering, September 19, 2004–September 22. Anonymous Elsevier 78–79, 260–265 (2005)
Kono, Y., Sekiguchi, A., Hirai, Y.: “Study on nano imprint lithography by the pre-exposure process (PEP),” advances in resist technology and processing XXII. Anonymous SPIE—Int. Soc. Opt. Eng. USA 5753, 912–925 (2005)
Yao, J., Yan, X., Lu, G.: Patterning colloidal crystals by lift-up soft lithography. Adv. Mater. 16(1), 81–84 (2004)
Choi, D., Jang, S.G., Yu, H.K.: Two-dimensional polymer Nanopattern by using particle-assisted soft lithography. Chem. Mater. 16(18), 3410–3413 (2004)
Chik, H., Liang, J., Cloutier, S.G.: Periodic array of uniform ZnO Nanorods by second-order self-assembly. Appl. Phys. Lett. 84(17), 3376–3378 (2004)
Masuda, H., Satoh, M.: Fabrication of gold Nanodot array using anodic porous alumina as an evaporation mask. Jan. J. Appl. Phys, Part 2 35(1), 126–129 (1996). (Letters)
Masuda, H., Yasui, K., Nishio, K.: Fabrication of ordered arrays of multiple Nanodots using anodic porous alumina as an evaporation mask. Adv. Mater. 12(14), 1031–1033 (2000)
Liang, J., Chik, H., Yin, A.: Two-dimensional lateral superlattices of Nanostructures: Nonlithographic formation by anodic membrane template. J. Appl. Phys. 91(4), 2544–2544 (2002)
Masuda, H., Fukuda, K.: Ordered metal Nanohole arrays made by a two-step replication of honeycomb structures of anodic alumina. Science 268(5216), 1466–1468 (1995)
Li, A.P., Muller, F., Birner, A.: Hexagonal pore arrays with a 50–420 Nm interpore distance formed by self-organization in anodic alumina. J. Appl. Phys. 84(11), 6023–6026 (1998)
Rozhok, S., Jung, S., Chandrasekhar, V.: atomic force microscopy of nickel dot arrays with tuning fork and Nanotube probe. J. Vac. Sci.Technol. B: Microelectron. Nanometer Struct. 21(1), 323–325 (2003)
Sandberg, R.L., Allred, D.D., Johnson, J.E.: A Comparison of Uranium Oxide and Nickel as Single-Layer Reflectors from 2.7 to 11.6 Nm. Proc. SPIE Int. Soc. Opt. Eng. 5193(1), 191–203 (2004)
Johnson, K.L.: Conatct mechanics. Cambridge University Press, New York (1987)
Oliver, W.C., Pharr, G.M.: An improved technique for determining hardness and elastic modulus using load and displacement sensing indentation experiments. J. Mater. Res. 7(6), 1564–1583 (1992)
Mirshams, R.A., Pothapragada, R.M.: Correlation of Nanoindentation measurements of nickel made using geometrically different indenter tips. Acta Mater. 54(4), 1123–1134 (2006)
Zhou, L.G., Huang, H.: Are surfaces elastically softer or stiffer? Appl. Phys. Lett. 84(11), 1940–1942 (2004)
Pethica, J. B., Tabor, D.:”Contact of characterised metal surfaces at very low loads: deformation and adhesion,” Second European Conference on Surface Science, 89, pp. 182–90. Anonymous Netherlands (1979)
Tabor, D.: “A Simple theory of static and dynamic hardness,” Proceedings of the Royal Society of London, Series A (Mathematical and Physical Sciences), 192, pp. 247–274 (1948)
Jackson, R.L., Green, I.: A finite element study of elasto-plastic hemispherical contact against a rigid flat. J. Tribol. 127(2), 343–354 (2005)
Ruoff, A.L.: On the yield strength of diamond. J. Appl. Phys. 50(5), 3354–3356 (1979)
Mesarovic, S.D., Fleck, N.A.: Frictionless indentation of dissimilar elastic-plastic spheres. Int. J. Solids Struct. 37(46–47), 7071–7091 (2000)
Greenwood, J.A., Johnson, K.L., Matsubara, E.: A surface roughness parameter in hertz contact. Wear 100, 47–57 (1984)
Acknowledgments
Financial support for the work reviewed was provided by the National Science Foundation, Arkansas Biosciences Institute, and the University of Arkansas. Contributions to the work reviewed from our collaborators Drs. Mathew Johnson (University of Oklahoma) and Robert Jackson (Auburn University) are gratefully acknowledged.
Author information
Authors and Affiliations
Corresponding author
Editor information
Editors and Affiliations
Rights and permissions
Copyright information
© 2013 Springer-Verlag Berlin Heidelberg
About this chapter
Cite this chapter
Zou, M., Wang, H. (2013). Mechanical Properties and Deformation Behavior of Ni Nanodot-Patterned Surfaces. In: Sinha, S., Satyanarayana, N., Lim, S. (eds) Nano-tribology and Materials in MEMS. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-642-36935-3_4
Download citation
DOI: https://doi.org/10.1007/978-3-642-36935-3_4
Published:
Publisher Name: Springer, Berlin, Heidelberg
Print ISBN: 978-3-642-36934-6
Online ISBN: 978-3-642-36935-3
eBook Packages: EngineeringEngineering (R0)