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Formation of High-Power Pulsed Titanium Ion Beams of Submillisecond Duration from Vacuum Arc Plasma

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Russian Physics Journal Aims and scope

A method is proposed for improving the performance properties of various materials, based on the synergy of high-intensity ion implantation and simultaneous energy impact on the surface, aimed at creating deep ionalloyed layers. Its implementation requires the use of repetitively-pulsed high-power density beams of metal and gas ions of submillisecond durations. This article presents the results of experimental studies on forming pulsed high-intensity titanium ion beams from vacuum arc plasma. The effect of the cell size of the grid electrode, shaped as a part of a sphere, on the focusing and transport efficiency is studied. A possibility of ballistic focusing of a titanium ion beam with a pulse duration from 150 to 500 μs and a power density of up to 100 kW/cm2 is experimentally shown.

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References

  1. Ion Implantation and Beam Processing (Eds. J. S. Williams and J. M. Poate), Acadmic, Orlando (1984).

  2. V. A. Shulov et al., Inorgan. Mater., Appl. Res., 4(3), 189 (2013).

  3. D. J. Rej et al., J. Vac. Sci. Technol. A. Vac., Surf., Films, 15(3), 1089 (1997).

  4. Surface Modification and Alloying by Laser, Ion, and Electron Beams (Eds. J. M. Poate, G. Foti, and D. C. Jacobson), Springer, Berlin (2013).

  5. A. I. Ryabchikov et al., Rev. Sci. Instrum., 63(4), 2428 (1992).

    Article  ADS  Google Scholar 

  6. Handbook of Plasma Immersion Ion Implantation and Deposition (Ed. A. Anders), John Wiley & Sons, New York (2000).

  7. A. I. Ryabchikov et al., Surf. Coat. Technol., 388, 125561 (2020).

    Article  Google Scholar 

  8. A. I. Ryabchikov et al., Surf. Coat. Technol., 355, 129 (2018).

    Article  Google Scholar 

  9. A. I. Ryabchikov et al., Surf. Coat. Technol., 388, 125557 (2020).

    Article  Google Scholar 

  10. A. I. Ryabchikov et al., Surf. Coat. Technol., 372, 1 (2019).

    Article  Google Scholar 

  11. A. I. Ryabchikov et al., IEEE Trans. Plasma Sci., 49(9), 2529 (2021).

    Article  ADS  Google Scholar 

  12. A. I. Ryabchikov et al., Rev. Sci. Instrum., 77(3), 03B516 (2006).

    Article  Google Scholar 

  13. A. A. Plyutto, Zh. Tekh. Eksp. Fiz., 39, Iss. 6, 1589 (1960).

  14. T. V. Koval et al., J. Phys.: Conf. Ser., 032007 (2018).

    Google Scholar 

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Authors and Affiliations

  1. National Research Tomsk Polytechnic University, Tomsk, Russia

    A. I. Ryabchikov, S. V. Dektyarev, O. S. Korneva & D. O. Vakhrushev

Authors
  1. A. I. Ryabchikov
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  2. S. V. Dektyarev
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  3. O. S. Korneva
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  4. D. O. Vakhrushev
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Corresponding author

Correspondence to A. I. Ryabchikov.

Additional information

Translated from Izvestiya Vysshikh Uchebnykh Zavedenii, Fizika, No. 11, pp. 138–144, November 2022

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Ryabchikov, A.I., Dektyarev, S.V., Korneva, O.S. et al. Formation of High-Power Pulsed Titanium Ion Beams of Submillisecond Duration from Vacuum Arc Plasma. Russ Phys J 65, 1940–1946 (2023). https://doi.org/10.1007/s11182-023-02854-y

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  • DOI: https://doi.org/10.1007/s11182-023-02854-y

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