Multielement nitride coatings of quasi-equiatomic compositions, (NbMoCrTiAl)N and (NbZrCu-TiAl)N, are synthesized by deposition on a substrate in vacuum from a multicomponent gas-metal plasma. This plasma is generated by a simultaneous independent vacuum-arc evaporation of the cathodes of the selected elements in a plasma-assisted mode in a nitrogen atmosphere. It has been established that the synthesized coatings are single-phase materials with a face-centered cubic crystal lattice. For the (NbZrCuTiAl)N coating composition, the crystal lattice parameter a = 0.44288 nm and for (NbMoCrTiAl)N – a = 0.40540 nm. The resulting nitride coatings have a nanocrystalline multilayer structure. Their microhardness depends on concentration and type of chemical elements, as well as on nitrogen pressure in the gas-metal plasma; it reaches 43 and 46.5 GPa for the (NbMoCrTiAl)N and (NbZrCuTiAl)N coatings, respectively.
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Translated from Izvestiya Vysshikh Uchebnykh Zavedenii, Fizika, No. 11, pp. 59–64, November, 2022.
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Ivanov, Y.F., Akhmadeev, Y.H., Koval, N.N. et al. Multielement Nitride Coatings of Quasi-Equiatomic Compositions Synthetized by the Ion-Plasma Method. Russ Phys J 65, 1855–1861 (2023). https://doi.org/10.1007/s11182-023-02842-2
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DOI: https://doi.org/10.1007/s11182-023-02842-2