Abstract
Nitride coatings based on the high-entropy alloy with the elemental composition of TiNbZrTaHf were formed by deposition onto a solid substrate in vacuum from a multi-component gas-metal plasma created by vacuum arc cathode evaporation with plasma assistance in a mixture of nitrogen and argon. It was shown that the coatings are a single-phase (FCC crystal structure; a = 0.4508 nm) nanocrystalline (2.5–3 nm) material with a hardness of 26 GPa and a Young’s modulus of 359.2 GPa.
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Funding
This work was carried out with the financial support of the Russian Federation through the Ministry of Science and Higher Education (project no. 075-15-2021-1348) within the framework of events nos. 3.1.4, 3.1.5, 3.1.12, and 3.1.13.
The research was carried out using the equipment of the CSU NMNT TPU, supported by the RF MES project no. 075-15-2021-710.
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Ivanov, Y.F., Akhmadeev, Y.H., Koval, N.N. et al. Nitride Coatings Based on a High-Entropy Alloy Formed by the Ion-Plasma Method. High Energy Chem 57 (Suppl 1), S77–S80 (2023). https://doi.org/10.1134/S0018143923070172
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DOI: https://doi.org/10.1134/S0018143923070172